激光与光电子学进展, 2020, 57 (9): 093101, 网络出版: 2020-05-06
微光系统CMOS光学调色膜的研制 下载: 1463次
Development of CMOS Optical Color Modulation Films for Low-Light-Level Systems
薄膜 彩色微光夜视 彩色滤镜 光学调色膜 膜系设计 膜厚控制 thin films low light level color night vision technology color filters optical color modulation film film design control of film thickness
摘要
针对微光系统光子数量较少的问题,研制出符合色度学的光学调色膜,构成六基色彩色滤镜,从而提升色彩还原度。通过对光谱特性的分析,利用Essential Macleod膜系设计软件以及Mathcad工程计算软件,建立采点迭代法优化模型,实现光学调色膜的膜系设计。采用电子束热蒸发方法制备薄膜。利用光控与晶控相结合的方法进行膜厚控制,以膜堆为单元进行反演分析,实现光学调色膜的研制。该薄膜通过光谱测试,满足使用要求。
Abstract
In this study, we develop optical color modulation films in accordance with colorimetry to address the problem of low photon quantity observed in a low-light-level system. This system comprises a six-color filter, promoting color rendition. Further, we develop a data acquisition and iteration method model, which can be used to obtain the film design of the optical color modulation films by analyzing the spectral properties and combining the Essential Macleod film design software with the Mathcad engineering calculation software. The films are deposited via electron beam evaporation. Subsequently, we combine the quartz crystal deposition monitoring technology with the optical deposition monitoring technology to control the film thickness. Furthermore, optical color modulation films can be developed by performing inverse analysis with respect to film stacks. The obtained films pass the spectrum test and satisfy the application requirements.
张静, 孙宇勃, 付秀华, 刘冬梅, 母一宁, 李爽. 微光系统CMOS光学调色膜的研制[J]. 激光与光电子学进展, 2020, 57(9): 093101. Jing Zhang, Yubo Sun, Xiuhua Fu, Dongmei Liu, Yining Mu, Shuang Li. Development of CMOS Optical Color Modulation Films for Low-Light-Level Systems[J]. Laser & Optoelectronics Progress, 2020, 57(9): 093101.