应用低温等离子体技术的多环减敏型FBG应变传感器

徐潇宇; 朱星盈; 肖少庆

doi:doi:10.3788/lop55.070602

激光与光电子学进展, 2018, 55 (7): 070602, 网络出版: 2018-07-20

应用低温等离子体技术的多环减敏型FBG应变传感器下载： 562次

Multi-Loop Desensitization Fiber Bragg Grating Strain Sensors Using Low Temperature Plasma Technology

论文大纲

徐潇宇朱星盈肖少庆 ^*

作者单位

江南大学物联网工程学院，江苏无锡 214000

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摘要

为了满足对船舶、桥梁、飞行器等的关键结构进行较大应变范围测量的需要，设计了一种应用低温等离子体技术的多环减敏型光纤布拉格光栅(FBG)应变传感器。对长为30 mm的三环减敏应变基片进行有限元分析，在传感器结构左右端面上各施加0.083 mm的位移，经计算可得，栅区的应变约为1700 με，结构的减敏系数为2.91。在实验中设置两组传感器进行对照实验，采用低温等离子体技术对其中一组传感器的栅区表面进行扫描处理，另外一组栅区不做处理，验证两组传感器在+5000 με以内的传感特性。实验结果表明,等离子体放电扫描处理次数越多,光纤光功率越大。系统平均测量误差约50 με，满量程精度小于0.5%，解决了由于封装过程中栅区端面污染导致的系统标定结果不稳定、线性度差等问题。

Abstract

In order to meet the need of large strain range measurement on the key structures of ship, bridge, aircraft, and so on, we design a multi-loop desensitized fiber Bragg grating (FBG) strain sensor based on low temperature plasma. Finite element analysis of a tricyclic desensitized strain gauge substrate with a length of 30 mm is carried out with a displacement of 0.083 mm on each of the left and right end faces. After calculation, the strain in the gate region is about 1700 με and the desensitization coefficient of the structure is 2.91. Two contrast groups are adopted to verify the sensing characteristics within +5000 με; low temperature plasma is used to treat the gate region surface for one group sensor; while the other is set as default. The results show that the more times the plasma discharge treates the gate region surface, the larger the fiber optical power becomes. The average measurement error of the system is about 50 με, and the full-scale accuracy is less than 0.5%, which solves the problems of instability and poor linearity of the system calibration results caused by the pollution of the gate end face during the packaging process.

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徐潇宇, 朱星盈, 肖少庆. 应用低温等离子体技术的多环减敏型FBG应变传感器[J]. 激光与光电子学进展, 2018, 55(7): 070602. Xu Xiaoyu, Zhu Xingying, Xiao Shaoqing. Multi-Loop Desensitization Fiber Bragg Grating Strain Sensors Using Low Temperature Plasma Technology[J]. Laser & Optoelectronics Progress, 2018, 55(7): 070602.

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