液晶与显示, 2017, 32 (7): 518, 网络出版: 2017-11-21
RIE模式干法刻蚀ADS产品铝腐蚀改善研究
Improvement of aluminum corrosion of ADS products by RIE etching mode dry etching
引用该论文
蒋会刚, 高建剑, 王晏酩, 赵海生, 王辉, 吴超. RIE模式干法刻蚀ADS产品铝腐蚀改善研究[J]. 液晶与显示, 2017, 32(7): 518.
JIANG Hui-gang, GAO Jian-jian, WANG Yan-ming, ZHAO Hai-sheng, WANG Hui, WU Chao. Improvement of aluminum corrosion of ADS products by RIE etching mode dry etching[J]. Chinese Journal of Liquid Crystals and Displays, 2017, 32(7): 518.
蒋会刚, 高建剑, 王晏酩, 赵海生, 王辉, 吴超. RIE模式干法刻蚀ADS产品铝腐蚀改善研究[J]. 液晶与显示, 2017, 32(7): 518. JIANG Hui-gang, GAO Jian-jian, WANG Yan-ming, ZHAO Hai-sheng, WANG Hui, WU Chao. Improvement of aluminum corrosion of ADS products by RIE etching mode dry etching[J]. Chinese Journal of Liquid Crystals and Displays, 2017, 32(7): 518.