表面轮廓仪传递函数对超光滑表面粗糙度测量的影响
徐长山, 巩岩, 向阳, 陈波, 曹健林. 表面轮廓仪传递函数对超光滑表面粗糙度测量的影响[J]. 光学 精密工程, 2002, 10(1): 45.
徐长山, 巩岩, 向阳, 陈波, 曹健林. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45.
[1] Haelbich R, Segmiiller A. Smooth multilayer films suitable for X-ray mirrors[J]. Appl. Phys. Lett, 1979, 34(3):184-186.
[2] Thomas N. Low-scatter, low-loss mirrors for laser gyros[J]. SPIE, 1978, 157: 41-48.
[3] 曹麟祥. 用光探测器测量激光陀螺反射镜的前后向散射[J]. 航空精密制造技术,1993, 29(5): 8-11.
[4] Moran M. Scatter intensity mapping of laser-illuminated coating defects[J]. Appl. Opt, 1988, 27: 957-962.
[5] Jin Ch Sh, Ma Y Y. Development of an experimental EUVL system[J]. 光学精密工程,2001,9(5):418-423.
[6] 卓永模,杨甬英. 第八届全国光学测试学术讨论会论文[C].合肥:安徽科技出版社,1999.
[7] Ralph J. Schwarz and Bernard Friedland, Linear Systems[M].New York:McGraw-hill Book Company, 1965.
[8] Church E L , Vorburger T V, Wyant J C,et al. Direct comparison of mechanical and optical measurements of the finish of precision machined optical surfaces[J]. Opt. Eng,1985, 24(3): 388-395.
徐长山, 巩岩, 向阳, 陈波, 曹健林. 表面轮廓仪传递函数对超光滑表面粗糙度测量的影响[J]. 光学 精密工程, 2002, 10(1): 45. 徐长山, 巩岩, 向阳, 陈波, 曹健林. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1): 45.
PDF全文
