激光与光电子学进展, 2018, 55 (3): 031202, 网络出版: 2018-09-10
大口径平面镜局部采样瑞奇-康芒检验 
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Local Sampling Ritchey-Common Test for Large Aperture Flat Mirror
图 & 表
图 2. (a)镜面坐标与(b)光瞳坐标关系图
Fig. 2. Relationship between (a) mirror surface and (b) pupil coordinates
图 3. 仿真面形图。(a)设定平面初始面形;(b)局部采样影响矩阵法恢复的面形
Fig. 3. Surface shape of simulation. (a) Initial surface shape of set plane; (b) recovery surface shape of local sampling impact matrix method
图 4. 面形偏差图。(a)传统影响矩阵法的面形偏差;(b)局部采样影响矩阵法的面形偏差
Fig. 4. Results of surface shape deviation. (a) Surface shape deviation of traditional impact matrix method; (b) surface shape deviation of local sampling impact matrix method
图 5. 传统影响矩阵法在不同像差下的面形偏差图。(a)离焦;(b) 0°像散;(c) 45°像散;(d) x方向三级彗差;(e) y方向三级彗差;(f) x方向三级像散;(g) y方向三级像散;(h)三级球差
Fig. 5. Surface shape deviation of traditional impact matrix method in different aberrations. (a) Defocus; (b) 0° astigmatism; (c) 45 ° astigmatism; (d) three levels of coma in x direction; (e) three levels of coma in y direction; (f) three levels of astigmatism in x direction; (g) three levels of astigmatism in y direction; (h) three levels of spherical aberration
图 6. 局部采样影响矩阵法在不同像差下的面形偏差图。(a)离焦;(b) 0°像散;(c) 45°像散;(d) x方向三级彗差;(e) y方向三级彗差;(f) x方向三级像散;(g) y方向三级像散;(h) 三级球差
Fig. 6. Surface shape deviation of local sampling impact matrix method in different aberrations. (a) Defocus; (b) 0° astigmatism; (c) 45° astigmatism; (d) three levels of coma in x direction; (e) three levels of coma in y direction; (f) three levels of astigmatism in x direction; (g) three levels of astigmatism in y direction; (h) three levels of spherical aberration
表 1不同像差下两种方法的RMS值对比
Table1. Comparison of RMS values of two methods under different aberrationsλ
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林冬冬, 胡明勇, 李金鹏, 丁耀芳. 大口径平面镜局部采样瑞奇-康芒检验[J]. 激光与光电子学进展, 2018, 55(3): 031202. Dongdong Lin, Mingyong Hu, Jinpeng Li, Yaofang Ding. Local Sampling Ritchey-Common Test for Large Aperture Flat Mirror[J]. Laser & Optoelectronics Progress, 2018, 55(3): 031202.
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