飞秒激光微加工中轴向超分辨相位板的设计及仿真

为了提高激光微加工质量，对激光焦斑进行整形，采用菲涅尔衍射公式进行了理论分析，基于遗传算法和设计约束条件通过Matlab设计了两种二元相位元件，0-π结构四环相位板的归一化半径尺寸r1=0.15、r2=0.70、r3=0.81，非0-π结构四环相位板的归一化半径尺寸为r1=0.25、r2=0.498、r3=0.652，从内到外各环对应的相位为2.879、3.087、0、3.012，采用这两种位相板调制后的纵向光斑大小可压缩至艾丽斑的76%和75%，峰值能量比分别为0.39和0.42，旁瓣能量分别为0.64和0.41，这两种相位板均可应用于飞秒激光微加工。

Abstract

In order to improve the quality of laser micromachining, the focal spot should be shaped. The Fresnel diffraction formula was analyzed, two kinds of axial super-resolved phase plates were designed by using Matlab based on genetic algorithms and design constraints. The normalized radiuses of 0-π structure phase plate of four-ring are r1=0.15、r2=0.70、r3=0.81, and the normalized radiuses of non-0-π structure phase plate of four-ring are r1=0.25、r2=0.498、r3=0.652, the phases of each ring from the inside to the outside are 2.879、3.087、0、3.012. The longitudinal spot sizes after using the two phase plates are compressible to 76% and 75% of the Airy pattern , the ratios of the peak energy are respectively 0.39 and 0.42, and sidelobe energy are respectively 0.64 and 0.41.Two phase plates can be applied in femtosecond laser microfabrication.

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蔡建文. 飞秒激光微加工中轴向超分辨相位板的设计及仿真[J]. 应用光学, 2014, 35(5): 908. Cai Jianwen. Design and simulation of axial super-resolved phase plate in femtosecond laser microfabrication[J]. Journal of Applied Optics, 2014, 35(5): 908.

飞秒激光微加工中轴向超分辨相位板的设计及仿真

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