光学仪器, 2018, 40 (1): 78, 网络出版: 2018-04-09   

光学元件表面缺陷检测方法研究现状

Study on surface defect detection method of optical element
作者单位
福州大学 机械工程及自动化学院, 福建 福州 350108
引用该论文

向弋川, 林有希, 任志英. 光学元件表面缺陷检测方法研究现状[J]. 光学仪器, 2018, 40(1): 78.

XIANG Yichuan, LIN Youxi, REN Zhiying. Study on surface defect detection method of optical element[J]. Optical Instruments, 2018, 40(1): 78.

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向弋川, 林有希, 任志英. 光学元件表面缺陷检测方法研究现状[J]. 光学仪器, 2018, 40(1): 78. XIANG Yichuan, LIN Youxi, REN Zhiying. Study on surface defect detection method of optical element[J]. Optical Instruments, 2018, 40(1): 78.

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