Chinese Optics Letters, 2012, 10 (7): 071202, Published Online: Apr. 5, 2012
Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement Download: 646次
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Bofan Wang, Zhongliang Li, Xiangzhao Wang. Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement[J]. Chinese Optics Letters, 2012, 10(7): 071202.