光学学报, 2009, 29 (2): 417, 网络出版: 2009-02-23   

相移正交物体运动方向的在线相位测量轮廓术

An On-Line Phase Measuring Profilometry with Phase-Shifting Perpendicular to Moving Direction of Measured Object
作者单位
四川大学光电科学技术系, 四川 成都 610064
摘要
提出了一种新型的基于相位测量轮廓术(PMP)的在线三维检测方法。只需要使投射的条纹相移方向与物体移动方向垂直,尽管由于物体运动使CCD采集变形条纹中物体坐标不一致,但通过像素匹配,可以使各帧图像物点坐标一一对应,得到与传统静态PMP等效的相移条纹图,即可重构出物体,实现在线三维测量。对一实平面进行了在线与静态PMP测试对比实验。结果显示该在线PMP方法与传统静态PMP方法的均方差之差仅为0.007 mm,表明该在线PMP方法具有高精度性;对一实物进行了在线测试实验,很好地重构出了被测物体的三维轮廓,从而验证了该方法的可行性和有效性。
Abstract
A new method of on-line 3D measurement based on phase measuring profilometry(PMP) has been proposed. It only needs to ensure the phase-shift direction of the projected sinusoidal stripe perpendicular to the object′s moving direction. Though the spatial coordinates of the captured distorted stripe images by CCD are inconsistent, by pixel matching algorithm, this inconsistency can be excluded, in addition, the equivalent phase-shifting distorted patterns needed by PMP can been obtained successfully. The profile of the measured object can be reconstructed which put the on-line 3D measurement into practice. A contrast experiment on a known plane inspected by the on-line PMP and the traditional static PMP is carried on, and the difference of mean square deviation between the two methods is only 0.007 mm,which shows the high veracity of the on-line PMP.A complex workpiece has also been on-line inspected, and the 3D profile of the workpiece can be reconstructed perfectly, which shows the feasibility and validity of the on-line PMP.
参考文献

[1] 盖绍彦,达飞鹏. 一种新的快速解相位方法[J]. 光学学报, 2008, 28(2): 259~267

    Gai Shaoyan, Da Feipeng. A new fast phase unwrapping method[J]. Acta Optica Sinica, 2008, 28(2): 259~267

[2] 李勇,苏显渝. 一种大视场相位测量轮廓术系统标定方法[J]. 光学学报, 2006, 26(8): 1162~1166

    Li Yong, Su Xianyu. New method for system calibration in phase measurement profilometry with large view field[J]. Acta Optica Sinica, 2006, 26(8): 1162~1166

[3] 田劲东,彭翔. 位错点阵投影的三维数字成像[J]. 光学学报, 2005, 25(10): 1319~1323

    Tian Jindong, Peng Xiang. Approach for three-dimensional digital Imaging via position-shift point array projection[J]. Acta Optica Sinica, 2005, 25(10): 1319~1323

[4] . Surface detection and 3D profilometry for micrstructure using optical metrology[J]. Opt. Lasers Eng., 2001, 36(1): 1-9.

[5] . 投影栅三维形面测量中亚像素匹配算法[J]. 清华大学学报, 2008, 48(3): 412-414.

    . Sub-pixel matching algorithm for projected grating 3D surface measurements[J]. J. Tsinghua University, 2008, 48(3): 412-414.

[6] . . Phase-measuring profilometry of moving object without phase-shifting device[J]. Opt. Lasers Eng., 2003, 40(3): 153-161.

[7] 朱勇建, 刘立人, 栾竹 等. 相位解包裹算法中基于调制度的新质量图[J]. 中国激光, 2006, 33(5): 667~672

    Zhu Yongjian, Liu Liren, Luan Zhu et al.. New quality map based on modulation for phase unwrapping algorithm[J]. Chin. J. Lasers, 2006, 33(5): 667~672

[8] . O. Saldner, J. M. Huntley. Temporal phase unwrapping: application to surface profiling of discontinuous objects[J]. Appl. Opt., 1997, 36(13): 2770-2774.

[9] 施展,赵宏,张璐. 基于双频彩色条纹投影的相位测量去包裹方法[J]. 光学学报, 2007, 27(3): 461~465

    Shi Zhan, Zhao Hong, Zhang Lu. Phase-unrapping mwthod based on dual frequency colorful fringe projection[J]. Acta Optica Sinica, 2007, 27(3): 461~465

[10] 吴庆阳,苏显渝,向立群 等. 线结构光双传感器测量系统的标定方法[J]. 中国激光, 2007, 34(2): 259~264

    Wu Qingyang, Su Xianyu, Xiang Liqun et al.. A new calibration method for two-sensor measurement system based on line-structure light[J]. Chinese J. Lasers, 2007, 34(2): 259~264

[11] 宋万忠,苏显渝,曹益平. 相位测量轮廓术中三维坐标校准新方法[J]. 光学学报, 2003, 23(3): 272~277

    Song Wanzhong, Su Xianyu, Cao Yiping. A new method of three-dimensional coordinates calibration in phase measuring profilometry[J]. Acta Optica Sinica, 2003, 23(3): 272~277

钟立俊, 曹益平. 相移正交物体运动方向的在线相位测量轮廓术[J]. 光学学报, 2009, 29(2): 417. Zhong Lijun, Cao Yiping. An On-Line Phase Measuring Profilometry with Phase-Shifting Perpendicular to Moving Direction of Measured Object[J]. Acta Optica Sinica, 2009, 29(2): 417.

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