光谱共焦位移传感器色散镜头设计

田雨; 刘宾

光学技术, 2018, 44 (3): 381, 网络出版: 2018-06-09

光谱共焦位移传感器色散镜头设计

Design of dispersion lens for chromatic confocal displacement sensor

论文大纲

田雨 ^*刘宾

作者单位

中北大学信息与通信工程学院信息探测与处理山西省重点实验室, 山西太原 030051

光学设计光电传感器色散镜头 optical design and fabrication photoelectric sensor dispersive lens ZEMAX ZEMAX

摘要

色散镜头是光谱共焦位移传感器的核心部件, 轴向色散与波长之间的线性度直接影响系统的测量精度。研究了轴向色散与玻璃材质之间的关系, 结合透镜组光焦度分配公式, 分析线性色散产生条件, 设计了一款色散镜头; 使用ZEMAX进行仿真优化, 镜头在500~700nm工作波段范围内, 色散范围约为150.34μm, 轴向色散与波长线性度通过一元线性拟合分析, 判定系数达0.9972, 镜头分辨率较高, 配合现有的光谱仪使用, 传感器分辨率可达纳米级, 满足高精度测量要求。

Abstract

The core component of the spectral confocal displacement sensor is the dispersive lens. The linearity between the axial dispersion and the wavelength directly affects the measurement accuracy of the system. By analyzing the relationship between the axial dispersion and the glass material, combined with the distribution formula of lens distribution, a dispersion lens is designed and ZEMAX simulation optimization is used. The set of lens, whose working wavelength range is 500~700nm, has a chromatic dispersion range of about 150.34μm. Through the linear regression fitting of axial dispersion and wavelength, it is obtained that the coefficient of determination is 0.9972. So the linearity of measurement is well. With the use of the existing spectrometer, the resolution of the sensor can reach the nanoscale level, which meets the requirements of high precision measurement.

参考文献

[1] McBride J W, Boltry P J, Zhao Z. The relationship between surface incline and con-focalchromatic aberration sensor response［J］.Proc. of SPIE(S0277-786X),2007,6618:66181F.

[2] M Minsky. microscopy apparatus:USA,3013467［P］.1962-12-19.

[3] Fischer Robert E. Optical system design:4th ed［M］. New York: McGraw Hill,2004.

[4] 玻恩, 沃尔夫. 光学原理［M］. 杨葭孙,译. 北京:科学出版社,1978.

Born M, Wolf E. Principles ofoptics［M］. Yang Jiasun, Transl. Beijing:Science Press,1978.

[5] 唐志列, 黄佐华, 梁瑞生, 等. 共焦显微镜的纵向分辨率极限及其判据［J］.量子电子学报,2007,17(3):199-204.

Tang Zhilie, Huang Zuohua, Liang Ruisheng, et al. The Vertical resolution limit and it's criterion of confocal microscopes［J］. Chinese Journal of Quantum Electronics,2007,17(3):199-204.

[6] 朱万彬, 钟俊, 莫仁芸, 等. 光谱共焦位移传感器物镜设计［J ］. 光电工程,2010,37(8):62-66.

Zhu Wanbin, Zhong Jun, Mo Renyun, et al. Design of confocal chromatic displacement sensor objective［J］. Opto-Electronic Engineering,2010,37(8):62-66.

[7] 武芃樾, 袁道成. 光谱共焦位移传感器镜头设计研究［J］.工具技术,2012,46(2):81-83.

Wu Pengyue, Yuan Daocheng. Research of design of lenses used for chromatic confocal displacement sensor［J］.Tool Engeineering,2012,46(2):81-83.

[8] 刘乾, 杨维川, 袁道成, 等. 光谱共焦显微镜的线性色散物镜设计［J］. 光学精密工程,2013,21(10):2473-2479.

Liu Qian, Yang Weichuan, Yuan Daocheng, et al. Design of liner dispersive objective for chromatic confocal microscope［J］. Optics and Precision Engineering,2013,21(10):2473-2479.

田雨, 刘宾. 光谱共焦位移传感器色散镜头设计[J]. 光学技术, 2018, 44(3): 381. TIAN Yu, LIU Bin. Design of dispersion lens for chromatic confocal displacement sensor[J]. Optical Technique, 2018, 44(3): 381.

光谱共焦位移传感器色散镜头设计

关于本站 Cookie 的使用提示

全站搜索

光谱共焦位移传感器色散镜头设计

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索