像质补偿在高分辨物镜精密装调中的应用
季振波, 刘克, 李艳秋, 章明. 像质补偿在高分辨物镜精密装调中的应用[J]. 光学技术, 2018, 44(1): 117.
JI Zhenbo, LIU Ke, LI Yanqiu, ZHANG Ming. The application of image quality compensation methods in fine assembly of the high resolution lens[J]. Optical Technique, 2018, 44(1): 117.
[1] 陈姣,焦明印,常伟军,等 近紫外-可见光宽波段复消色差显微物镜设计［J］. 应用光学, 2011,6(32):1098-1102.
Chen Jiao, Jiao Mingyin, Chang Weijun, et al. Optical design of apochromatic microscope objective for near Ultraviolet-visible wide spectrum［J］. Journal of Applied Optics,2011,6(32):1098-1102.
[2] 胡大伟,李艳秋,刘晓林. 超高数值孔径Schwarzschild投影光刻物镜的光学设计［J］. 光学学报, 2013,33(1):0122004.
[3] 明名,王建立,张景旭,等. 大口径望远镜光学系统的误差分配与分析［J］. 光学精密工程, 2009,1(17):104-108.
Ming Ming, Wang Jianli, Zhang Jingxu, et al. Error budget and analysis for optical system in large telescope［J］. Optics and Precision Engineering,2009,1(17):104-108.
[4] 刘丽萍,王骐,李琦. 折衍混合式相干激光雷达天线系统的设计［J］. 激光与红外,2002,32(1):15-17.
Liu Liping, Wang Qi, Li Qi. A design scheme of simplifying coherent laser radar antenna system［J］. Laser & Infrared,2002,32(1):15-17.
[5] 林来兴. 小卫星高分辨率成像系统［J］. 上海航天, 2011,28(6):54-57.
Lin Laixing. High-resolution imaging system of small satellite［J］. Aerospace Shanghai,2011,28(6):54-57.
[6] Yaegashi H, Oyama K, Hara A, et al. Noble approaches on double patterning process toward sub 15nm［J］. SPIE, 2013,8685(18):86850M.
[7] Steve Slonaker. Further pursuit of correlation between lens aberration content and imaging performance［J］. SPIE, 2001, 5040:1581-1590.
[8] Liu Xiaolin, Li Yanqiu, Liu Ke. Automatic figure errors balancing method for catoptrics and catadioptric lenses［J］. Optical Engineering,2014,53(3):035101-1-6.
[9] 徐伟才. 投影光刻物镜的光学设计与像质补偿［D］. 长春: 中国科学院长春光学精密机械与物理研究所,2011.
Xu Weicai. Optical design and imaging performance compensation for the lithographic lens［D］. Changchun: Changchun Instltute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences,2011.
[10] Hironori Ikezawa, Yasuhiro Ohmura. A hyper-NA projection lens for ArF immersion exposure tool［J］. SPIE,2006, 6154: 615421.
[11] Hirotaka Kohno, Yuichi Shibazaki.Latest performance of immersion scanner S620D with the stream light platform for the double patterning generation［J］. SPIE, 2010,7640:76401.
季振波, 刘克, 李艳秋, 章明. 像质补偿在高分辨物镜精密装调中的应用[J]. 光学技术, 2018, 44(1): 117. JI Zhenbo, LIU Ke, LI Yanqiu, ZHANG Ming. The application of image quality compensation methods in fine assembly of the high resolution lens[J]. Optical Technique, 2018, 44(1): 117.
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