像质补偿在高分辨物镜精密装调中的应用

季振波; 刘克; 李艳秋; 章明

光学技术, 2018, 44 (1): 117, 网络出版: 2018-02-01

像质补偿在高分辨物镜精密装调中的应用

The application of image quality compensation methods in fine assembly of the high resolution lens

论文大纲

季振波 ^1,*刘克 ¹李艳秋 ¹章明 ²

作者单位

¹ 北京理工大学光电学院光电成像技术与系统教育部重点实验室, 北京 100081

² 中国科学院光电技术研究所, 成都 610209

高分辨成像精密装调轴向补偿旋转补偿 high resolution imaging fine assembly axial compensation clocking compensation

摘要

根据高分辨物镜各个光学元件的实测数据, 应用轴向补偿和旋转补偿法, 在仿真精密装调过程中得到了物镜轴向补偿器的最优值和各元件的最佳旋转角度。仿真结果表明, 在97.7%的置信区间内, 物镜各视场波像差RMS值从补偿前的0.087λ(λ=632.8 nm)减小到了补偿后的0.040 λ。依据获得的参数对物镜进行了装调实验, 结果表明, 激光干涉仪测得的物镜各视场波像差RMS值介于0.050～0.082λ之间, 基本达到了衍射极限的分辨率要求, 验证了像质补偿方法的有效性。

Abstract

According to the actual data of the high resolution lens all optical element, the axial and rotational compensation method, in the process of simulation precision with adjustable, the optimal value of the objective axial compensator and the best rotation angle of each element are obtained. The simulation results show that in the confidence interval of 97.7%, the RMS value of each field of the objective mirror is reduced from 0.087λ(λ=632.8 nm)to 0.040λ. According to the simulation to obtain the parameters are used for alignment experiment of the objective. The experiment results show that the wavefront error RMS value of the full field of view of the system tested by ZYGO interferometer is between 0.050 and 0.082λ, which almost meet the requirements of the diffraction limit and verify the validity of the optimization methods.

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季振波, 刘克, 李艳秋, 章明. 像质补偿在高分辨物镜精密装调中的应用[J]. 光学技术, 2018, 44(1): 117. JI Zhenbo, LIU Ke, LI Yanqiu, ZHANG Ming. The application of image quality compensation methods in fine assembly of the high resolution lens[J]. Optical Technique, 2018, 44(1): 117.

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