全反射式宽光谱成像椭偏仪
姜春光, 谌雅琴, 刘涛, 熊伟, 李国光, 纪峰. 全反射式宽光谱成像椭偏仪[J]. 光电工程, 2016, 43(1): 0055.
JIANG Chunguang, CHEN Yaqin, LIU Tao, XIONG Wei, LI Guoguang, JI Feng. All-reflective Broadband Spectroscopic Imaging Ellipsometer[J]. Opto-Electronic Engineering, 2016, 43(1): 0055.
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姜春光, 谌雅琴, 刘涛, 熊伟, 李国光, 纪峰. 全反射式宽光谱成像椭偏仪[J]. 光电工程, 2016, 43(1): 0055. JIANG Chunguang, CHEN Yaqin, LIU Tao, XIONG Wei, LI Guoguang, JI Feng. All-reflective Broadband Spectroscopic Imaging Ellipsometer[J]. Opto-Electronic Engineering, 2016, 43(1): 0055.
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