镀有增透膜的多层衍射光学元件的优化设计方法 
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Optimal Design for Multi-Layer Diffractive Optical Elements with Antireflection Films
1 西北工业大学理学院陕西省光信息技术重点实验室, 陕西 西安 710072
2 西北工业大学理学院超常条件材料物理与化学教育部重点实验室, 陕西 西安 710072
图 & 表
图 1. 典型的分离型双层衍射光学元件。(a)光学微结构;(b)光线传输轨迹
Fig. 1. Typical separate double-layer diffractive optical elements. (a) Optical microstructure; (b) light transmission path
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图 2. 镀有增透膜的多层衍射光学元件。(a)增透膜的物理结构;(b)光学微结构
Fig. 2. MLDOEs with antireflection films. (a) Physical structure of antireflection films; (b) optical microstructure
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图 3. 传统方法计算得到的多层衍射光学元件的衍射效率。(a)理论衍射效率;(b)实际衍射效率
Fig. 3. Calculated diffraction efficiency of MLDOEs with traditional method. (a) Theoretical diffraction efficiency; (b) actual diffraction efficiency
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图 4. 入射角度与传统方法计算得到的多层衍射光学元件多色光积分衍射效率的关系
Fig. 4. Relationship between incident angle and calculated PIDE of MLDOEs by traditional method
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图 5. 传统方法计算得到的多层衍射光学元件的衍射效率
Fig. 5. Calculated diffraction efficiency of MLDOEs with antireflection coatings with traditional method
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图 6. 优化方法计算得到的多层衍射光学元件的衍射效率。(a)连续入射角度下入射波长对衍射效率的影响;(b) 2种入射角度下入射波长对衍射效率的影响
Fig. 6. Calculated diffraction efficiency of MLDOEs with optimal method. (a) Effect of incident wavelength on diffraction efficiency at continuous incident angles; (b) effect of incident wavelength on diffraction efficiency at two incident angles
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表 1多层衍射光学元件增透膜的膜系参数
Table1. Film system parameters of antireflection films for MLDOEs
| Substrate material | Film material | Thickness /nm |
|---|
| PMMA (substrate 1) | SiO2 | 91.77 | | ZrO2 | 10.00 | | SiO2 | 48.75 | | ZrO2 | 44.78 | | SiO2 | 10.00 | | ZrO2 | 67.63 | | SiO2 | 86.98 | | Polycarb (PC)(substrate 2) | SiO2 | 22.46 | | Ta2O5 | 18.61 | | SiO2 | 30.09 | | Ta2O5 | 57.94 | | SiO2 | 10.00 | | Ta2O5 | 41.02 | | SiO2 | 88.96 |
|
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表 2计算得到的多层衍射光学元件表面微结构的高度
Table2. Calculated heights of surface microstructure of MLDOEs
| Microstructure height /μm | Traditional method | Optimal method |
|---|
| PMMA | Polycarb | PMMA | Polycarb |
|---|
| H1 | 16.462 | | 16.091 | | | H2 | | -12.815 | | -12.661 |
|
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表 3传统方法计算得到的多层衍射光学元件的衍射效率
Table3. Calculated diffraction efficiency of MLDOEs with traditional method
| Wavelength /μm | Diffraction efficiency /% |
|---|
| Theoretical values | Actual values |
|---|
| Incident angle of 0° | Incident angle of 10° | | Incident angle of 0° | Incident angle of 10° | | 0.400 | 94.845 | 98.350 | 96.508 | 92.935 | | 0.435 | 99.996 | 99.094 | 86.146 | 79.045 | | 0.450 | 99.770 | 98.001 | 83.604 | 76.291 | | 0.550 | 99.578 | 97.918 | 87.123 | 81.425 | | 0.598 | 100 | 99.456 | 92.459 | 88.135 | | 0.650 | 99.301 | 99.977 | 96.032 | 94.274 | | 0.700 | 97.277 | 99.969 | 99.473 | 98.140 |
|
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表 4优化方法计算得到的多层衍射光学元件在特定波长处的衍射效率
Table4. Calculated diffraction efficiency of MLDOEs at some specific wavelengths with optimal method
| Wavelength /μm | Diffraction efficiency /% |
|---|
| Incident angle of 0° | Incident angle of 10° |
|---|
| 0.400 | 94.855 | 98.076 | | 0.435 | 100 | 99.280 | | 0.450 | 99.775 | 98.276 | | 0.550 | 99.588 | 98.147 | | 0.598 | 100 | 99.560 | | 0.650 | 99.296 | 99.950 | | 0.700 | 97.273 | 98.845 |
|
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表 52种设计方法下多层衍射光学元件的PIDE
Table5. PIDE of MLDOEs for two design methods
| Incident angle /(°) | PIDE /% |
|---|
| Traditional method | Optimal method |
|---|
| Theoretical value | Actual value | | 0 | 99.252 | 89.893 | 99.257 | | 5 | 99.213 | 88.741 | 99.220 | | 10 | 98.597 | 84.806 | 98.730 |
|
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毛珊, 赵建林. 镀有增透膜的多层衍射光学元件的优化设计方法[J]. 光学学报, 2019, 39(3): 0305001. Shan Mao, Jianlin Zhao. Optimal Design for Multi-Layer Diffractive Optical Elements with Antireflection Films[J]. Acta Optica Sinica, 2019, 39(3): 0305001.
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