F-P腔式光纤MEMS压力传感器的设计
葛益娴, 赵伟绩, 张鹏. F-P腔式光纤MEMS压力传感器的设计[J]. 半导体光电, 2017, 38(6): 788.
GE Yixian, ZHAO Weiji, ZHANG Peng. Design of An Optical Fiber MEMS Pressure Sensor Based on F-P Cavity[J]. Semiconductor Optoelectronics, 2017, 38(6): 788.
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葛益娴, 赵伟绩, 张鹏. F-P腔式光纤MEMS压力传感器的设计[J]. 半导体光电, 2017, 38(6): 788. GE Yixian, ZHAO Weiji, ZHANG Peng. Design of An Optical Fiber MEMS Pressure Sensor Based on F-P Cavity[J]. Semiconductor Optoelectronics, 2017, 38(6): 788.
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