F-P腔式光纤MEMS压力传感器的设计

提出了一种新型结构的法布里-珀罗(F-P)腔光纤压力传感器。该传感器基于法布里-珀罗多光束干涉, 利用压力敏感膜的纵向挠度变化带动位移柱的横向位移运动来改变F-P腔的腔长变化。详细阐述了传感器新结构的设计方法及其工作原理, 分析了不同参数对传感器性能的影响。采用ANSYS软件仿真模拟了传感器压力敏感膜在压力作用下的挠度变化。结合现有的MEMS工艺, 可制作出工艺简单、温度系数低、灵敏度高, 且抗电磁干扰的MEMS光纤压力传感器。

Abstract

A novel structure of F-P cavity optical fiber pressure sensor was proposed. Based on Fabry-Perot interference, the sensor uses the longitudinal deflection of the pressure sensitive membrane to drive the lateral displacement of the displacement column to change the cavity length. The design method of the sensor and its working principle were described in detail, and the influence of different parameters on the sensor performance was analyzed. The deflection of the pressure sensitive diaphragm under pressure was simulated by ANSYS software. Combined with the existing MEMS technology, MEMS fiber pressure sensors with the characteristics of simple process, low temperature coefficient, high sensitivity and anti-electromagnetic interference can be produced.

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葛益娴, 赵伟绩, 张鹏. F-P腔式光纤MEMS压力传感器的设计[J]. 半导体光电, 2017, 38(6): 788. GE Yixian, ZHAO Weiji, ZHANG Peng. Design of An Optical Fiber MEMS Pressure Sensor Based on F-P Cavity[J]. Semiconductor Optoelectronics, 2017, 38(6): 788.

F-P腔式光纤MEMS压力传感器的设计

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