Dual-beam super-resolution direct laser writing nanofabrication technology

Yaoyu Cao; Fei Xie; Pengda Zhang; Xiangping Li

光电工程, 2017, 44 (12): 1254, 网络出版: 2018-01-17

Dual-beam super-resolution direct laser writing nanofabrication technology

Yaoyu Cao Fei Xie Pengda Zhang Xiangping Li

作者单位

Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou 510632, China

图 & 表

Yaoyu Cao, Fei Xie, Pengda Zhang, Xiangping Li. Dual-beam super-resolution direct laser writing nanofabrication technology[J]. 光电工程, 2017, 44(12): 1254. Yaoyu Cao, Fei Xie, Pengda Zhang, Xiangping Li. Dual-beam super-resolution direct laser writing nanofabrication technology[J]. Opto-Electronic Engineering, 2017, 44(12): 1254.