光学学报, 2018, 38 (3): 0328010, 网络出版: 2018-03-20
光纤法布里-珀罗传感器研究进展 
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Recent Progress of Optical Fiber Fabry-Perot Sensors
图 & 表
图 1. (a)光纤F-P传感系统;(b)光纤F-P传感器
Fig. 1. (a) Optical fiber F-P sensing system; (b) optical fiber F-P sensor
图 2. SCI、EI、CNKI检索的光纤F-P传感器文章统计。(a)近年发文数量统计;(b)第一作者所属地区统计
Fig. 2. Statistics of optical fiber F-P sensor articles indexed by SCI, EI, and CNKI. (a) Number of the articles in recent years; (b) district statistics of the first author
图 3. 本征型光纤F-P腔加工新方法。(a)飞秒激光侧面照射;(b)空芯光纤
Fig. 3. New method of processing the intrinsic optical fiber F-P cavity. (a) Femtosecond laser irradiation on the side; (b) hollow fiber
图 4. 基于微结构加工工艺的非本征F-P腔。(a)全硅微结构;(b)硼硅玻璃与二氧化硅膜;(c) SU-8胶法
Fig. 4. Extrinsic F-P cavity based on microstructure processing technology. (a) Silicon substrate; (b) borosilicate glass and SiO2 diaphragm; (c) SU-8 photoresist
图 5. 光纤端面微加工F-P腔。(a)飞秒激光加工;(b)化学腐蚀加工;(c)石墨烯薄膜
Fig. 5. Micro fabrication of F-P cavity on fiber end face. (a) Treated with femtosecond laser; (b) treated with chemical etch; (c) graphene diaphragm
图 6. 光纤侧面微加工F-P腔。(a)飞秒激光加工;(b)磨削加工
Fig. 6. Micro-machining of F-P cavity on fiber side face. (a) Femtosecond laser processing; (b) grinding processing
图 7. 空芯光纤的气泡F-P腔。(a)放电处理;(b)形成气泡
Fig. 7. Fabrication of fiber bubble F-P cavity on hollow fiber. (a) Discharge treatment; (b) formation of bubble
图 8. 浸油光纤的气泡F-P腔加工过程示意图
Fig. 8. Fabrication of fiber bubble F-P cavity with oil immersed fiber
图 10. 干涉信号解调输出图。(a)傅里叶变换频谱图;(b)离散腔长变换结果图;(c)相关解调结果图
Fig. 10. Demodulation outputs of interference signal. (a) Fourier transform spectrogram; (b) discrete cavity length conversionresults; (c) correlation demodulation results
图 11. 实际光源光谱条件下(a)F-P腔输出的光谱;(b)傅里叶变换结果;(c)相关解调结果
Fig. 11. Influence of actual spectrum source on (a) F-P cavity output spectrum, (b) Fourier transform results, and (c) correlation demodulation results
图 12. F-P腔并联复用解调原理。 (a)双F-P腔并联;(b)干涉输出信号;(c)傅里叶变换频谱
Fig. 12. Principle of demodulation for parallel multiplex F-P cavities. (a) Parallel multiplex of twin F-P cavities; (b) interferometric output signals; (c) Fourier transform spectrum
图 13. F-P腔串联复用解调原理。(a)双F-P腔串联;(b)干涉输出信号;(c)傅里叶变换频谱;(d)干涉信号包络
Fig. 13. Principle of demodulation for series multiplex F-P cavities. (a) Series multiplex of twin F-P cavities; (b) interferometric output signals; (c) Fourier transform spectrum; (d) envelopes of interferometric output signals
图 14. (a)光谱接收型解调系统;(b)基于高精细度可调光谱滤波器的解调系统
Fig. 14. Demodulation system with (a) a spectrometer as a spectral receiver and (b) a high fineness tunable filter as a spectral receiver
图 17. 非扫描型相关解调系统。(a)系统原理图;(b)楔形平板等厚干涉;(c)输出信号
Fig. 17. Non-scanning correlation demodulation system. (a) System principle diagram; (b) interference fringe of optical wedge; (c) output signal
图 18. 相关解调系统的改进。(a)双折射光楔偏振检测方案;(b)光楔倾斜入射与反射方案
Fig. 18. Improved correlation demodulation system. (a) Birefringence wedge and polarization detection; (b) inclined incidence and reflection
图 19. 相位调制解调型系统。(a)相位生成载波解调系统;(b)外差调制解调系统;(c)信号处理
Fig. 19. Demodulating system for phase modulation. (a) Phase generation carrier; (b) heterodyne; (c) signal processing
图 20. 航空器光纤压力传感系统。(a)微型光纤F-P压力传感器;(b)多通道光纤F-P测量仪
Fig. 20. Fiber F-P sensing system for aircraft. (a) Micro fiber F-P pressure sensor; (b) multi-channels fiber F-P demodulation system
图 21. 光纤F-P应变传感器系统及其工程应用。(a)混凝土埋入式光纤F-P应变传感器;(b)光纤F-P应变解调仪;(c)光纤F-P传感器系统应用于大型桥梁结构健康监测
Fig. 21. Fiber F-P strain sensor system and its application. (a) Embedded fiber F-P strain sensor for concrete; (b) fiber F-P strain demodulator; (c) its application to structural health monitoring system for long-span bridges
陈伟民, 雷小华, 张伟, 刘显明, 廖昌荣. 光纤法布里-珀罗传感器研究进展[J]. 光学学报, 2018, 38(3): 0328010. Chen Weimin, Lei Xiaohua, Zhang Wei, Liu Xianming, Liao Changrong. Recent Progress of Optical Fiber Fabry-Perot Sensors[J]. Acta Optica Sinica, 2018, 38(3): 0328010.
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