355 nm紫外激光损伤阈值自动测量装置及实验

胡建平; 唐明; 张问辉; 段利华; 胡江川; 马平; 许乔

光学与光电技术, 2005, 3 (3): 22, 网络出版: 2006-05-22

355 nm紫外激光损伤阈值自动测量装置及实验

Automatic Measurement Device of Damage Threshold of 355 nm Laser and Its Experiment

论文大纲

胡建平 ^*唐明张问辉段利华胡江川马平许乔

作者单位

成都精密光学工程研究中心,成都,610041

损伤阈值自动测量紫外激光 damage threshold automatic measurement ultraviolet laser

摘要

介绍了一套355 nm紫外激光损伤阈值自动测量装置.该测量装置由一台Nd:YAG激光器产生紫外355 nm激光,经过紫外激光传输系统,紫外激光聚焦形成测试激光.脉冲激光能量由激光能量计监测,Normaski显微镜判断样片的激光损伤.另外,整个测量装置和测量过程由计算机集成控制,具有良好的操作性和运行参数控制能力,可实现1-on-1,n-on-1,s-on-1,R-on-1等多种激光损伤测试.

Abstract

In this paper, the automatic measurement device of 355nm laser damage threshold has been introduced in details. The 355nm ultraviolet radiation produced by Nd:YAG laser device is focused to probe the sample. The pulse energy is monitored by EM500 energy meter and the sample damage is determined by 100X Normaski microscope. In addition, the measurement device and damage measurement process are integrated and controlled by computer software, which has friendly operation and command ability. So the damage measurement device can process the damage threshold measurement such as 1-on-1, n-on-1, s-on-1, and R-on-1, etc.

参考文献

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[3] ISO/DIS 11254, Optics and Optical Instruments-Laser and Laser related equipment Test methods for laser induced damage threshold of optical surface[S], 1999

[4] 胡建平, 邱服民, 付雄鹰, 等. SiO2半波覆盖层对HfO2/SiO2高反膜激光损伤的影响[J]. 强激光与离子束, 2001, 13(2): 137～141

[5] 胡建平, 马平, 许乔. 1064nm激光增强HfO2/SiO2薄膜的抗激光损伤实验研究[J]. 强激光与粒子束, 2003, 15(11): 1053～1056

[6] 胡建平,陈梅. HfO2/SiO2高反射膜的缺陷及其激光损伤[J]. 强激光与离子束, 2001, 13(5): 529～532

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[8] JJF1059. 测量不确定度评定与表示[S], 1999

胡建平, 唐明, 张问辉, 段利华, 胡江川, 马平, 许乔. 355 nm紫外激光损伤阈值自动测量装置及实验[J]. 光学与光电技术, 2005, 3(3): 22. 胡建平, 唐明, 张问辉, 段利华, 胡江川, 马平, 许乔. Automatic Measurement Device of Damage Threshold of 355 nm Laser and Its Experiment[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2005, 3(3): 22.

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