Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature

Shiqi Tao; Qingzhong Huang; Liangqiu Zhu; Jun Liu; Yinglu Zhang; Ying Huang; Yi Wang; Jinsong Xia

doi:doi:10.1364/PRJ.6.000686

Photonics Research, 2018, 6 (7): 07000686, Published Online: Jul. 4, 2018

Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature Download： 720次

Shiqi Tao ¹Qingzhong Huang ^1,2,*Liangqiu Zhu ¹Jun Liu ¹Yinglu Zhang ¹Ying Huang ¹Yi Wang ¹Jinsong Xia ^1,3,*

Author Affiliations

¹ Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China

² e-mail: huangqz@mail.hust.edu.cn

³ e-mail: jsxia@hust.edu.cn

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Shiqi Tao, Qingzhong Huang, Liangqiu Zhu, Jun Liu, Yinglu Zhang, Ying Huang, Yi Wang, Jinsong Xia. Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature[J]. Photonics Research, 2018, 6(7): 07000686.

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