Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature 
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1 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
2 e-mail: huangqz@mail.hust.edu.cn
3 e-mail: jsxia@hust.edu.cn
Figures & Tables
Fig. 1. Schematics of the athermal (a) MZI filter and (b) 4-channel MZI (de-)multiplexer.
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Fig. 2. (a) Simulated effective index and TOC of the TE0 mode; inset: cross section of SiN waveguide. (b)–(d) Field profiles of the TE0 mode for W=0.44 μm, 1.2 μm, and 1.8 μm, respectively.
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Fig. 3. (a) Optical microscope image of the athermal 4-channel (de-)multiplexer. SEM images of (b) a 2×2 MMI, (c) narrow waveguide and normal waveguide connected by a taper, (d) wide waveguide and normal waveguide connected by a taper, and (e) grating coupler for vertical coupling.
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Fig. 4. Transmission spectra of MZI filters at different temperatures for (a) L=410 μm, (b) L=430 μm, (c) L=450 μm, and (d) L=470 μm. (e) Wide transmission spectrum of the MZI filter with L=450 μm.
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Fig. 5. (a) Thermal sensitivity as a function of L. (b) Thermal sensitivity as a function of wavelength.
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Fig. 6. Measured normalized transmission spectra of (a) conventional MZI (de-)multiplexer and (b) athermal MZI (de-)multiplexer.
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Fig. 7. Spectral shift with temperature for (a) Ch. 1, (b) Ch. 2, (c) Ch. 3, and (d) Ch. 4.
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Table1. Room-Temperature Performance of the Athermal MZI (De-)Multiplexer
| | Ch. 1 | | Ch. 2 | | Ch. 3 | | Ch. 4 | | Center wavelength (nm) | 1293.6 | | 1297.7 | | 1301.9 | | 1306.1 | | Crosstalk at center (dB) | −30 | | −25 | | −22 | | −23 | | 1-dB bandwidth (nm) | 2.2 | | 2.2 | | 2.2 | | 2.2 | | Insertion loss (dB) | 5.5 | | 5.2 | | 5.5 | | 5.5 | | Channel spacing (nm) | | 4.3 | | 4.0 | | 4.2 | |
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Table2. Performance Comparison of the MZI Filters and (De-)Multiplexers with Low Thermal Sensitivity (MUX, multiplexer; IL, insertion loss; ET, extinction ratio for MZI filter; XT, crosstalk for MUX)
| Ref. | Material | Device | (pm/°C) | IL (dB) | ET/XT (dB) | | Dwivedi et al. [22] | Silicon | MZI filter | (in 40 nm) | 0.3 | −25 | | Yang et al. [24] | Silicon | MZI filter | (in 30 nm) | N.A. | −30 | | Xing et al. [23] | Silicon | MZI filter | (in 60 nm) | 1 | −10 | | Our device | SiN (PECVD) | MZI filter | (in 55 nm) | 2.6 | −30 | | Hassan et al. [25] | Silicon | MZI MUX 4 | (all channels) | 4.3 | −15 | | Gao et al. [30] | SiN (LPCVD) | MZI MUX 4 | 18.7 (central channel) | 1.8 | −20 | | Bucio et al. [36] | SiN (PECVD) | AMMI MUX 3 | 10 (central channel) | 2.5 | −18 | | Our device | SiN (PECVD) | MZI MUX 4 | (all channels) | 5.5 | −22 |
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Shiqi Tao, Qingzhong Huang, Liangqiu Zhu, Jun Liu, Yinglu Zhang, Ying Huang, Yi Wang, Jinsong Xia. Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature[J]. Photonics Research, 2018, 6(7): 07000686.
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