非球面非零位检测中的回程误差分析与校正
刘东, 杨甬英, 田超, 翁俊淼, 卓永模, 杨李茗. 非球面非零位检测中的回程误差分析与校正[J]. 光学学报, 2009, 29(3): 688.
Liu Dong, Yang Yongying, Tian Chao, Weng Junmiao, Zhuo Yongmo, Yang Liming. Analysis and Correction of Retrace Error for Nonnull Aspheric Testing[J]. Acta Optica Sinica, 2009, 29(3): 688.
[1] Paul Scott. Recent developments in the measurement of aspheric surfaces by contact stylus instrumentation[C]. SPIE, 2002, 4927:199～207
[2] 李直,赵洋,李达成 等. 衍射型长程大型非球面轮廓测量仪[J]. 光学学报, 2002, 22(10): 1224～1228
[3] . A null corrector for paraboloidal mirrors[J]. Appl. Opt., 1963, 2: 153-156.
[4] 伍凡. 非球面零检验的Dall补偿器设计[J]. 应用光学, 1993, 14(02):1～4
Wu Fan. Design of dall compensator for aspherical surface null testing[J]. J. of Appl. Opt., 1993, 14(02):1～4
[5] . C. Wyant, V. P. Bennett. Using computer generated holograms to test aspheric wavefronts[J]. Appl. Opt., 1972, 11: 2833.
[6] . C. Wyant, C. R. Hayslett. Rough surface interferometry at 10.6 microns[J]. Appl. Opt., 1980, 19: 1862-1869.
[7] J. C. Wyant, K. Creath. Two-wavelength phase-Shifting interferometer and method[P]. U.S. Patent No.4,1989,832,489
[8] . . Radial shearing interferometer for in-process measurement of diamond turning[J]. Opt. Eng., 2000, 39: 2696-2699.
[9] Liu Dong, Yang Yongying, Shen Yibing et al.. System optimization of radial shearing interferometer for aspheric testing[C]. SPIE, 2007,6834: 68340U
[10] Yang Yongying, Liu Dong, Shen Yibing et al.. Study on testing larger asphericity in nonnull interferometer[C]. SPIE, 2007, 6834： 68340T
[11] Joseph M. Geary, Marty Yoo, Guojun Si. Retrace error: a case study[C]. SPIE, 1992, 1776: 98～105
[12] Neil Gardner and Angela Davies. Retrace error evaluation on a figure-measuring interferometer[C]. SPIE,2005, 5869： 58690V-1-8
[13] Ting-Chung Poon, Taegeun Kim. “Geometrical Optics” in Engineering Optics with Matlab[M]. Singapore: World Scientific Publishing, 2006
[14] Junmiao Weng, Yongying Yang, Dong Liu et al.. The wavefront aberration analysis and testing accuracy evaluation for the large aberration aspheric system based on the best fit sphere[C]. SPIE, 2007, 6834： 68342V
[15] . E. Greivenkamp, R. O. Gappinger. Design of a nonnull interferometer for aspheric wave fronts[J]. Appl. Opt., 2004, 43: 5143-5151.
刘东, 杨甬英, 田超, 翁俊淼, 卓永模, 杨李茗. 非球面非零位检测中的回程误差分析与校正[J]. 光学学报, 2009, 29(3): 688. Liu Dong, Yang Yongying, Tian Chao, Weng Junmiao, Zhuo Yongmo, Yang Liming. Analysis and Correction of Retrace Error for Nonnull Aspheric Testing[J]. Acta Optica Sinica, 2009, 29(3): 688.
PDF全文
