Laser-induced defects in optical multilayer coatings by the spatial resolved method

Chong Shan; Yuanan Zhao; Yanqi Gao; Xiaohui Zhao; Guohang Hu; Weixin Ma; Jianda Shao

doi:doi:10.3788/COL201917.031403

Chinese Optics Letters, 2019, 17 (3): 031403, Published Online: Mar. 8, 2019

Laser-induced defects in optical multilayer coatings by the spatial resolved method Download： 581次

Chong Shan ¹Yuanan Zhao ^2,3,*Yanqi Gao ^1,4Xiaohui Zhao ¹Guohang Hu ²Weixin Ma ¹Jianda Shao ^2,**

Author Affiliations

¹ Shanghai Institute of Laser Plasma, China Academy of Engineering Physics, Shanghai 201800, China

² Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

³ State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

⁴ IFSA Collaborative Innovation Center, Shanghai Jiao Tong University, Shanghai 200240, China

Figures & Tables

Fig. 1. Schematic diagram of spatial resolved damage testing system.

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Fig. 2. Nd:YAG laser beam position at the wavelength of 355 nm with $0.5 J / {cm}^{2}$ laser peak fluence in (a) the beam profiler and (b) the CCD camera. The silver film was tested for beam position calibration.

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Fig. 3. (a) Recorded picture of the sample before laser irradiation. (b) Defect damage position in the Gaussian beam after laser irradiation at the wavelength of 355 nm with $26.4 J / {cm}^{2}$ peak fluence. The triple frequency splitter was tested for the defect damage threshold. The elliptical shadow with rings around it in the middle of the image is illumination light for observing the defect damage position in the CCD camera.

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Fig. 4. Transmittance spectrum of the multilayer coating prepared via reactive e-beam evaporation.

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Fig. 5. SEM images of defect damages: class A was irradiated by the 355 nm laser with fluence of (a) $5.69 J / {cm}^{2}$ and (b) $7.16 J / {cm}^{2}$ , respectively; class B was irradiated by the 355 nm laser with the fluence of (c) $8.33 J / {cm}^{2}$ and (d) $7.62 J / {cm}^{2}$ , respectively.

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Fig. 6. Electric field of the triple frequency splitter by the 355 nm laser.

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Fig. 7. (a), (b) SEM images and (c),(d) FIB images: class B defect damage morphology of the triple frequency splitter by the 355 nm laser irradiation with the fluence of (a) $9.15 J / {cm}^{2}$ and (b) $6.81 J / {cm}^{2}$ , respectively; (c) and (d) recorded depth information of class B defect damage morphology.

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Fig. 8. SEM images of defect damages: class A was irradiated by the 532 nm laser with the fluence of (a) $5.26 J / {cm}^{2}$ and (b) $7.12 J / {cm}^{2}$ , respectively; class B was irradiated by the 355 nm laser with the fluence of (c) $8.93 J / {cm}^{2}$ and (d) $13.66 J / {cm}^{2}$ , respectively.

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Fig. 9. Electric field of the triple frequency splitter irradiated by the 532 nm laser.

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Table1. Results of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 355 nm Laser

Class	1-on-1 Method ( $J / {cm}^{2}$ )	Spatial Resolved Method ( $J / {cm}^{2}$ )
Class A	9.61	1.63
Class B	15.73	4.38

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Table2. Result of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 532 nm Laser

Class	1-on-1 Method ( $J / {cm}^{2}$ )	Spatial Resolved Method ( $J / {cm}^{2}$ )
Class C	14.17	5.26
Class D	19.36	8.33

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Chong Shan, Yuanan Zhao, Yanqi Gao, Xiaohui Zhao, Guohang Hu, Weixin Ma, Jianda Shao. Laser-induced defects in optical multilayer coatings by the spatial resolved method[J]. Chinese Optics Letters, 2019, 17(3): 031403.

Laser-induced defects in optical multilayer coatings by the spatial resolved method Download： 581次

Fig. 1. Schematic diagram of spatial resolved damage testing system.

Fig. 2. Nd:YAG laser beam position at the wavelength of 355 nm with $0.5 J / {cm}^{2}$ laser peak fluence in (a) the beam profiler and (b) the CCD camera. The silver film was tested for beam position calibration.

Fig. 4. Transmittance spectrum of the multilayer coating prepared via reactive e-beam evaporation.

Fig. 5. SEM images of defect damages: class A was irradiated by the 355 nm laser with fluence of (a) $5.69 J / {cm}^{2}$ and (b) $7.16 J / {cm}^{2}$ , respectively; class B was irradiated by the 355 nm laser with the fluence of (c) $8.33 J / {cm}^{2}$ and (d) $7.62 J / {cm}^{2}$ , respectively.

Fig. 6. Electric field of the triple frequency splitter by the 355 nm laser.

Fig. 8. SEM images of defect damages: class A was irradiated by the 532 nm laser with the fluence of (a) $5.26 J / {cm}^{2}$ and (b) $7.12 J / {cm}^{2}$ , respectively; class B was irradiated by the 355 nm laser with the fluence of (c) $8.93 J / {cm}^{2}$ and (d) $13.66 J / {cm}^{2}$ , respectively.

Fig. 9. Electric field of the triple frequency splitter irradiated by the 532 nm laser.

Table1. Results of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 355 nm Laser

Table2. Result of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 532 nm Laser

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Laser-induced defects in optical multilayer coatings by the spatial resolved method Download： 581次

Fig. 1. Schematic diagram of spatial resolved damage testing system.

Fig. 2. Nd:YAG laser beam position at the wavelength of 355 nm with 0.5 J/cm2 laser peak fluence in (a) the beam profiler and (b) the CCD camera. The silver film was tested for beam position calibration.

Fig. 4. Transmittance spectrum of the multilayer coating prepared via reactive e-beam evaporation.

Fig. 5. SEM images of defect damages: class A was irradiated by the 355 nm laser with fluence of (a) 5.69 J/cm2 and (b) 7.16 J/cm2, respectively; class B was irradiated by the 355 nm laser with the fluence of (c) 8.33 J/cm2 and (d) 7.62 J/cm2, respectively.

Fig. 6. Electric field of the triple frequency splitter by the 355 nm laser.

Fig. 7. (a), (b) SEM images and (c),(d) FIB images: class B defect damage morphology of the triple frequency splitter by the 355 nm laser irradiation with the fluence of (a) 9.15 J/cm2 and (b) 6.81 J/cm2, respectively; (c) and (d) recorded depth information of class B defect damage morphology.

Fig. 8. SEM images of defect damages: class A was irradiated by the 532 nm laser with the fluence of (a) 5.26 J/cm2 and (b) 7.12 J/cm2, respectively; class B was irradiated by the 355 nm laser with the fluence of (c) 8.93 J/cm2 and (d) 13.66 J/cm2, respectively.

Fig. 9. Electric field of the triple frequency splitter irradiated by the 532 nm laser.

Table1. Results of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 355 nm Laser

Table2. Result of the Defect Damage Threshold of the Triple Frequency Splitter by Only the 532 nm Laser

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Fig. 2. Nd:YAG laser beam position at the wavelength of 355 nm with $0.5 J / {cm}^{2}$ laser peak fluence in (a) the beam profiler and (b) the CCD camera. The silver film was tested for beam position calibration.

Fig. 5. SEM images of defect damages: class A was irradiated by the 355 nm laser with fluence of (a) $5.69 J / {cm}^{2}$ and (b) $7.16 J / {cm}^{2}$ , respectively; class B was irradiated by the 355 nm laser with the fluence of (c) $8.33 J / {cm}^{2}$ and (d) $7.62 J / {cm}^{2}$ , respectively.