激光与光电子学进展, 2015, 52 (5): 050002, 网络出版: 2015-05-06  

用于微型拉曼光谱仪分光芯片的阵列波导光栅研究进展 下载: 965次

Research Progress on Arrayed Waveguide Grating Chip for Micro Raman Spectrometer
作者单位
1 厦门理工学院光电与通信工程学院, 福建 厦门 361024
2 福建省光电信息材料与器件重点实验室, 福建 厦门 361024
摘要
微型拉曼光谱仪的核心部件是分光芯片,研制出适应微型拉曼光谱仪微型化、加工精度高、成本低的新型分光芯片对于打破目前的国外技术专利封锁,获得属于我国的自主知识产权具有重要意义。将本来诞生于光通信领域的阵列波导光栅用于微型拉曼光谱仪是研究的新思路,其具有尺寸小、精度高、工艺简单、易于批量生产的优点。总结介绍了用于微型拉曼光谱仪分光芯片的阵列波导光栅在国内外的研究进展,并且作了相应的分析,提出了一定的改进方法。
Abstract
The core component of the micro Raman spectrometer is its spectroscopic chip. It has the important meaning to develope the new spectroscopic chip the micro Raman spectrometer with microminiaturization, high machining accuracy and low cost. This work can help us to break the current foreign technology patent blockade and obtain intellectual property rights of our own country. Arrayed waveguide grating is originally used in the optical communication field. It is a new thought to arrayed waveguide grating as the spectroscopic chip for the micro Raman spectrometer. Arrayed waveguide grating has the advantages of small size, high precision, simple processing, and easy to mass production. The research progress on arrayed waveguide grating chip for micro Raman spectrometer at home and abroad is described and the corresponding analysis is made. In addition, an improved method is proposed for arrayed waveguide grating used for spectroscopic chip.
参考文献

[1] J Li, Y Huang, Y Ding, et al.. Shell-isolated nanoparticle-enhanced Raman spectroscopy[J]. Nature, 2010, 464: 392-395.

[2] 安岩, 孙强, 朴仁官, 等. 用于微型拉曼光谱仪的外光路光学系统[J]. 激光与光电子进展, 2012, 49(3): 032204.

    An Yan, Sun Qiang, Piao Renguan, et al.. Optical system of the probe for a micro-Raman spectrometer [J]. Laser & Optoelectronics Progress, 2012, 49(3): 032304.

[3] 温志渝, 陈刚, 王建国. 基于Fabry-Perot 腔阵列的集成化微型光谱仪方案及模拟[J]. 光谱学与光谱分析, 2006, 26(10): 1955-1959.

    Wen Zhiyu, Chen Gang, Wang Jianguo. The project and simulation of a compositive miniature spectrum instrument based on the array of Fabry-Perot cavity[J]. Spectroscopy and Spectral Analysis, 2006, 26(10): 1955-1959.

[4] Yang B, Zhu Y, Jiao Y, et al.. Compact arrayed waveguide grating devices based on small SU-8 strip waveguides[J]. J Lightwave Technol, 2011, 29(13): 2009-2014.

[5] Changming Chen, Hui Wang, Lei Wang, et al.. Athermal polarization-indepengent 49-channel UV curable all-polymer arrayed waveguide grating (AWG) multiplexer[J]. Optik, 2014, 125(1): 521-525.

[6] Daoxin Dai, Zhi Wang, Jared F Bauters, et al.. Low-loss Si3N4 arrayed-waveguide grating (de) multiplexer using nanocore optical waveguides[J]. Opt Express, 2011, 19(15):14130-14136.

[7] P Cheben, J H Schmid, A Delage, et al.. A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides[J]. Opt Express, 2007, 15(5): 2299-2306.

[8] K Kodate, Y Komai. Compact spectroscopic sensor using an arrayed waveguide grating[J]. Journal of Optics A: Pure and Applied Optics, 2008, 10(4): 044011.

[9] M K Smit, C Van Dam. PHASAR-based WDM-devices: Principles, design and applications[J]. IEEE J Sel Top Quantum Electron, 1996, 2(2): 236-250.

[10] R Adar, C H Henry, C Dragone, R C Kistler, et al.. Broad-band array multiplexers made with silica waveguides on silicon[J]. J Lightwave Technol, 1993, 11(2): 212-219.

[11] N Ismail, Fei Sun, Gabriel Sengo, et al.. Improved arrayed-waveguide-grating layout avoiding systematic phase errors [J]. Opt Express, 2011, 19(9): 8781-8794.

[12] N Ismail, A C Baclig, P J Caspers, et al.. Design of low-loss arrayed waveguide gratings for applications in integrated Raman spectroscopy[C]. Conference on Lasers and Electro-Optics, 2010: CFAT.

[13] N Ismail, L P Choo-Smith, K Worhoff, et al.. Raman spectroscopy with an integrated arrayed-waveguide grating[J]. Opt Lett, 2011, 36(23): 4629-4631.

[14] Nguyen V D, Akca B I, Wohoff K, et al.. Spectral domain optical coherence tomography imaging with an integrated optics spectrometer[J]. Opt Lett, 2011, 36(7): 1293-1295.

[15] Yebo N A, Bogaerts W, Hens Z, et al.. On-chip interrogation of a silicon-on-insulator microring resonator-based ethanol vapor sensor with an arrayed waveguide grating (AWG) spectrometer[C]. SPIE, 2012, 8264: 8264P.

[16] Cvetojevic N, Lawrence J, Ellis S C, et al.. Characterization and on-sky demonstration of an integrated photonic spectrograph for astronomy[J]. Opt Express, 2009, 17(21): 18643-18650.

[17] Bland-Hawthorn J, Law rence J, Robertson G, et al.. PIMMS: Photonic integrated multimode microspectrograph[C]. SPIE, 2010, 7735: 7735N.

[18] Law rence J, Betters C, Bland-Hawthorn J, et al.. Development of an array-waveguide grating astronomical spectrograph [C]. Frontiers in Optics, 2010: FTUU4.

[19] Cui Yongsheng, Yin Yu, Wu Yulin, et al.. Research of high power and stable laser in portable Raman spectrometer based on SHINERS technology[C]. SPIE, 2013, 8910: 89101J.

[20] 郝鹏, 吴一辉, 张鹏, 等. 一种基于MEMS 微硅多狭缝分光光度计[J]. 光谱学与光谱分析, 2009, 29(6): 1713-1716.

    Hao Peng, Wu Yihui, Zhang Peng, et al.. A micro-silicon multi-slit spectrophotometer based on MEMS technology[J]. Spectroscopy and Spectral Analysis, 2009, 29(6): 1713-1716.

[21] 王波, 梁中翥, 孔延梅, 等. 用于微型光谱仪的硅基多级微反射镜设计与制作研究[J]. 物理学报, 2010, 59(2): 907-912.

    Wang Bo, Liang Zhongzhu, Kong Yanmei, et al.. Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer[J]. Acta Physica Sinica, 2010, 59(2): 907-912.

[22] 程亚琴. 用于微型拉曼光谱仪的阵列波导光栅AWG 分光芯片研究[D]. 厦门: 厦门大学, 2013: 6.

    Cheng Yaqin. Research on Waveguide Grating AWG Spectral Chip Used in Miniature Raman Spectrometer[D]. Xiamen: Xiamen University, 2013: 6.

[23] Yingchao Xu, Qingna Wang, Wenzhang Zhu. Design and simulation of arrayed waveguide grating for miniature Raman spectrometer[J]. Applied Mechanics and Materials, 2014, 644-650: 3588-3592.

许英朝, 王清娜, 林洪沂, 朱文章. 用于微型拉曼光谱仪分光芯片的阵列波导光栅研究进展[J]. 激光与光电子学进展, 2015, 52(5): 050002. Xu Yingchao, Wang Qingna, Lin Hongyi, Zhu Wenzhang. Research Progress on Arrayed Waveguide Grating Chip for Micro Raman Spectrometer[J]. Laser & Optoelectronics Progress, 2015, 52(5): 050002.

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