Chinese Optics Letters, 2015, 13 (s1): S12203, Published Online: Jan. 27, 2015
SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser
Basic Information
| DOI: | 10.3788/col201513.s12203 |
| 中图分类号: | -- |
| 栏目: | Optical design and fabrication |
| 项目基金: | -- |
| 收稿日期: | Apr. 7, 2014 |
| 修改稿日期: | -- |
| 网络出版日期: | Jan. 27, 2015 |
| 通讯作者: | |
| 备注: | -- |
Zhiyu Zhang, Yang Xu, Binzhi Zhang. SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser[J]. Chinese Optics Letters, 2015, 13(s1): S12203.
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