SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser
Zhiyu Zhang, Yang Xu, Binzhi Zhang. SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser[J]. Chinese Optics Letters, 2015, 13(s1): S12203.
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Zhiyu Zhang, Yang Xu, Binzhi Zhang. SEM observation and Raman analysis on 6H–SiC wafer damage irradiated by nanosecond pulsed Nd:YAG laser[J]. Chinese Optics Letters, 2015, 13(s1): S12203.
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