Enhancement of laser ablation via interacting spatial double-pulse effect

Rui Zhou; Shengdong Lin; Ye Ding; Huan Yang; Kenny Ong Yong Keng; Minghui Hong

doi:doi:10.29026/oea.2018.180014

Opto-Electronic Advances, 2018, 1 (8): 180014, Published Online: Jan. 10, 2019

Enhancement of laser ablation via interacting spatial double-pulse effect

Rui Zhou ^1,*Shengdong Lin ¹Ye Ding ^2,3Huan Yang ^2,4Kenny Ong Yong Keng ²Minghui Hong ²

Author Affiliations

¹ Department of Mechanical and Electrical Engineering, School of Aerospace Engineering, Xiamen University, Xiamen 361102, China

² Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576

³ School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China

⁴ College of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou, 325035, China

Figures & Tables

Fig. 1. Schematic diagram of the experimental setup for the spatial double-pulse laser ablation.

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Fig. 2. SEM images, 3D reconstructions and 2D profiles of craters created by the splitted double-pulse laser beams at different gaps of (a) 100 μm, (b) 80 μm, (c) 60 μm, (d) 0 μm, and (e) by single laser beam at a total laser power of 10 W.

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Fig. 3. SEM images of (a) two intersecting grooves processed by double laser pulses and (b) zoom-in state.

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Fig. 4. The schematic diagram of distributions of energy field (upper), temperature field (middle) and the interaction between laser and silicon (bottom) at different gaps.(a) Large gap. (b) Optimal gap. (c) Zero gap.

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Rui Zhou, Shengdong Lin, Ye Ding, Huan Yang, Kenny Ong Yong Keng, Minghui Hong. Enhancement of laser ablation via interacting spatial double-pulse effect[J]. Opto-Electronic Advances, 2018, 1(8): 180014.

Enhancement of laser ablation via interacting spatial double-pulse effect

Fig. 1. Schematic diagram of the experimental setup for the spatial double-pulse laser ablation.

Fig. 2. SEM images, 3D reconstructions and 2D profiles of craters created by the splitted double-pulse laser beams at different gaps of (a) 100 μm, (b) 80 μm, (c) 60 μm, (d) 0 μm, and (e) by single laser beam at a total laser power of 10 W.

Fig. 3. SEM images of (a) two intersecting grooves processed by double laser pulses and (b) zoom-in state.

Fig. 4. The schematic diagram of distributions of energy field (upper), temperature field (middle) and the interaction between laser and silicon (bottom) at different gaps.(a) Large gap. (b) Optimal gap. (c) Zero gap.

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Enhancement of laser ablation via interacting spatial double-pulse effect

Fig. 1. Schematic diagram of the experimental setup for the spatial double-pulse laser ablation.

Fig. 2. SEM images, 3D reconstructions and 2D profiles of craters created by the splitted double-pulse laser beams at different gaps of (a) 100 μm, (b) 80 μm, (c) 60 μm, (d) 0 μm, and (e) by single laser beam at a total laser power of 10 W.

Fig. 3. SEM images of (a) two intersecting grooves processed by double laser pulses and (b) zoom-in state.

Fig. 4. The schematic diagram of distributions of energy field (upper), temperature field (middle) and the interaction between laser and silicon (bottom) at different gaps.(a) Large gap. (b) Optimal gap. (c) Zero gap.

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