基于激光成像的面形误差检测方法

针对在制造装配过程中，由于太阳能聚光反射镜的子镜结构尺寸过大导致面形检测效率低、精度差、检测难度高等问题，提出了一种基于激光成像的镜面面形误差检测方法。该方法利用图像处理技术对激光点阵的成像进行分析，通过分辨不同的激光束反射成像阵列点在像平面坐标系中的位置，反推出所对应的入射光阵列发生镜面反射时在反射镜坐标系中的坐标值，将上述入射点阵列坐标值代入标准抛物面方程进行拟合，采用最速下降迭代法计算获得整个反射面的面形误差值。通过与三坐标测量机对反射面的测量结果进行比较，表明该方法的测量精度可达到0.8 mrad。

Abstract

In order to solve the problems of low checking efficiency, low precision and high checking difficulty of surface caused by the oversize of sub-lens structure of solar energy concentrating mirror in the process of manufacture and assembly, a detection method of mirror surface shape error based on laser imaging is proposed. In this method, image processing technologies are employed to analyze the imaging of laser dot matrix. The coordinate values of the mirror coordinate system are deduced when the corresponding incident light array occurs specular reflection by distinguishing the position of reflection imaging array points with different laser beams at the image plane coordinate system. The shape error of the whole reflecting surface is obtained by substituting the above incident point array coordinate values into standard paraboloidal equation to fit and calculating with the steepest descent iterative method. By comparing the measurement results of reflector with coordinate measurement machine, the result shows that the measurement accuracy of the proposed method can reach 0.8 mrad.

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李艳, 李浩, 高峰, 朱延炎. 基于激光成像的面形误差检测方法[J]. 激光与光电子学进展, 2016, 53(9): 091202. Li Yan, Li Hao, Gao Feng, Zhu Yanyan. Detection Method of Surface Error Based on Laser Imaging[J]. Laser & Optoelectronics Progress, 2016, 53(9): 091202.

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