光学技术, 2018, 44 (6): 681, 网络出版: 2019-01-10
高精度共焦自准直中心偏测量装置
Confocal self-collimation decentration measurement structure with high accuracy
补充材料
葛洪, 王允, 邱丽荣. 高精度共焦自准直中心偏测量装置[J]. 光学技术, 2018, 44(6): 681. GE Hong, WANG Yun, QIU Lirong. Confocal self-collimation decentration measurement structure with high accuracy[J]. Optical Technique, 2018, 44(6): 681.