13.5  nm Schwarzschild microscope with high magnification and high resolution

Shenghao Chen; Xin Wang; Qiushi Huang; Shuang Ma; Zhanshan Wang

doi:doi:10.3788/COL201715.043401

Chinese Optics Letters, 2017, 15 (4): 043401, Published Online: Jul. 25, 2018

13.5 nm Schwarzschild microscope with high magnification and high resolution

Shenghao Chen Xin Wang Qiushi Huang Shuang Ma Zhanshan Wang ^*

Author Affiliations

Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

Figures & Tables

Fig. 1. Optical structure of the Schwarzschild microscope.

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Fig. 2. Image MTF curve of the Schwarzschild objective.

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Fig. 3. Object resolutions along with the change of object distance at different FOVs: (a) 1 to 1200 nm resolution; (b) zoomed-in view of the 0 to 450 nm resolutions in (a).

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Fig. 4. Object resolutions along with the change of image distance at different FOVs.

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Table1. Parameters of the Schwarzschild Objective

$L_{1}$ (mm)	$L_{2}$ (mm)	$L_{3}$ (mm)	$H_{1}$ (mm)	$H_{2}$ (mm)	$R_{1}$ (mm)	$R_{2}$ (mm)
119.659	60.504	3221.000	47.592	9.824	93.452	32.480

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Shenghao Chen, Xin Wang, Qiushi Huang, Shuang Ma, Zhanshan Wang. 13.5 nm Schwarzschild microscope with high magnification and high resolution[J]. Chinese Optics Letters, 2017, 15(4): 043401.

13.5 nm Schwarzschild microscope with high magnification and high resolution

Fig. 1. Optical structure of the Schwarzschild microscope.

Fig. 2. Image MTF curve of the Schwarzschild objective.

Fig. 3. Object resolutions along with the change of object distance at different FOVs: (a) 1 to 1200 nm resolution; (b) zoomed-in view of the 0 to 450 nm resolutions in (a).

Fig. 4. Object resolutions along with the change of image distance at different FOVs.

Fig. 5. MTF of different errors.

Fig. 6. Schematic of the source and the Schwarzschild imaging system.

Fig. 7. Best imaging figure and the intensity profile.

Fig. 8. Comparison of the results between the simulation and experiment.

Fig. 9. Best object points are imaged ten times.

Table1. Parameters of the Schwarzschild Objective

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13.5 nm Schwarzschild microscope with high magnification and high resolution

Fig. 1. Optical structure of the Schwarzschild microscope.

Fig. 2. Image MTF curve of the Schwarzschild objective.

Fig. 3. Object resolutions along with the change of object distance at different FOVs: (a) 1 to 1200 nm resolution; (b) zoomed-in view of the 0 to 450 nm resolutions in (a).

Fig. 4. Object resolutions along with the change of image distance at different FOVs.

Fig. 5. MTF of different errors.

Fig. 6. Schematic of the source and the Schwarzschild imaging system.

Fig. 7. Best imaging figure and the intensity profile.

Fig. 8. Comparison of the results between the simulation and experiment.

Fig. 9. Best object points are imaged ten times.

Table1. Parameters of the Schwarzschild Objective

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