[1] OtaK,
YamamotoT,
FukudaY, et al.
Advanced point diffraction interferometer for EUV aspherical mirrors[C]. SPIE,
2001,
4343:
543-
550.
OtaK,
YamamotoT,
FukudaY, et al.
Advanced point diffraction interferometer for EUV aspherical mirrors[C]. SPIE,
2001,
4343:
543-
550.
[2] Otaki K, Ota K, Nishiyama I, et al. Development of the point diffraction interferometer for extreme ultraviolet lithography: design, fabrication, and evaluation[J]. Journal of Vacuum Science & Technology B, 2002, 20(6): 2449-2458.
Otaki K, Ota K, Nishiyama I, et al. Development of the point diffraction interferometer for extreme ultraviolet lithography: design, fabrication, and evaluation[J]. Journal of Vacuum Science & Technology B, 2002, 20(6): 2449-2458.
[3] Wang D D, Yang Y Y, Chen C, et al. Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces[J]. Applied Optics, 2011, 50(16): 2342-2348.
Wang D D, Yang Y Y, Chen C, et al. Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces[J]. Applied Optics, 2011, 50(16): 2342-2348.
[4] Gao F, Jiang Z D, Zhao Z X, et al. Measurement of aspheric surface combining point diffraction interferometry and annular subaperture stitching[J]. Optical Engineering, 2015, 54(1): 014102.
Gao F, Jiang Z D, Zhao Z X, et al. Measurement of aspheric surface combining point diffraction interferometry and annular subaperture stitching[J]. Optical Engineering, 2015, 54(1): 014102.
[5] 黄磊, 高志山, 杨忠明, 等. 针孔式点衍射干涉仪的无镜成像方法[J]. 光学学报, 2017, 37(3): 0312002.
黄磊, 高志山, 杨忠明, 等. 针孔式点衍射干涉仪的无镜成像方法[J]. 光学学报, 2017, 37(3): 0312002.
Huang L, Gao Z S, Yang Z M, et al. Lensless imaging method for pinhole type point diffraction interferometer[J]. Acta Optica Sinica, 2017, 37(3): 0312002.
Huang L, Gao Z S, Yang Z M, et al. Lensless imaging method for pinhole type point diffraction interferometer[J]. Acta Optica Sinica, 2017, 37(3): 0312002.
[6] OtakiK,
Zhu YS,
IshiiM, et al.
Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[C]. SPIE,
2004,
5193:
182-
190.
OtakiK,
Zhu YS,
IshiiM, et al.
Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[C]. SPIE,
2004,
5193:
182-
190.
[7] 陈琛, 杨甬英, 王道档, 等. 基于时域有限差分方法的点衍射波前误差分析[J]. 中国激光, 2011, 38(9): 0908003.
陈琛, 杨甬英, 王道档, 等. 基于时域有限差分方法的点衍射波前误差分析[J]. 中国激光, 2011, 38(9): 0908003.
Chen C, Yang Y Y, Wang D D, et al. Analysis of point-diffraction wavefront error based on finite difference time domain method[J]. Chinese Journal of Lasers, 2011, 38(9): 0908003.
Chen C, Yang Y Y, Wang D D, et al. Analysis of point-diffraction wavefront error based on finite difference time domain method[J]. Chinese Journal of Lasers, 2011, 38(9): 0908003.
[8] 高芬, 蒋庄德, 李兵. 不同对准误差下的小孔衍射波面误差分析[J]. 光学学报, 2014, 34(8): 0812004.
高芬, 蒋庄德, 李兵. 不同对准误差下的小孔衍射波面误差分析[J]. 光学学报, 2014, 34(8): 0812004.
Gao F, Jiang Z D, Li B. Analysis of diffraction wavefront error caused by alignment error of pinhole[J]. Acta Optica Sinica, 2014, 34(8): 0812004.
Gao F, Jiang Z D, Li B. Analysis of diffraction wavefront error caused by alignment error of pinhole[J]. Acta Optica Sinica, 2014, 34(8): 0812004.
[9] Creath K, Hariharan P. Phase-shifting errors in interferometric tests with high-numerical-aperture reference surfaces[J]. Applied Optics, 1994, 33(1): 24-25.
Creath K, Hariharan P. Phase-shifting errors in interferometric tests with high-numerical-aperture reference surfaces[J]. Applied Optics, 1994, 33(1): 24-25.
[10] Moore R C, Slaymaker F H. Direct measurement of phase in a spherical-wave Fizeau interferometer[J]. Applied Optics, 1980, 19(13): 2196-2200.
Moore R C, Slaymaker F H. Direct measurement of phase in a spherical-wave Fizeau interferometer[J]. Applied Optics, 1980, 19(13): 2196-2200.
[11] 黄深旺, 陈磊, 陈进榜, 等. 斐索型球面干涉仪移相误差的探讨[J]. 光子学报, 1996, 25(10): 883-888.
黄深旺, 陈磊, 陈进榜, 等. 斐索型球面干涉仪移相误差的探讨[J]. 光子学报, 1996, 25(10): 883-888.
Wang S W, Cheng L, Cheng J B, et al. Phase-shifting errors in a spherical-wave Fizeau interferometer[J]. Acta Photonica Sinica, 1996, 25(10): 883-888.
Wang S W, Cheng L, Cheng J B, et al. Phase-shifting errors in a spherical-wave Fizeau interferometer[J]. Acta Photonica Sinica, 1996, 25(10): 883-888.
[12] Schmit J, Creath K. Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry[J]. Applied Optics, 1995, 34(19): 3610-3619.
Schmit J, Creath K. Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry[J]. Applied Optics, 1995, 34(19): 3610-3619.
[13] 高芬, 蒋庄德, 李兵, 等. 基于扩展平均的多步相移算法及误差抑制特性比较[J]. 光子学报, 2014, 43(4): 0426001.
高芬, 蒋庄德, 李兵, 等. 基于扩展平均的多步相移算法及误差抑制特性比较[J]. 光子学报, 2014, 43(4): 0426001.
Gao F, Jiang Z D, Li B, et al. Multi-step phase-shifting algorithm based on extended averaging technique and its error suppression characteristics comparison[J]. Acta Photonica Sinica, 2014, 43(4): 0426001.
Gao F, Jiang Z D, Li B, et al. Multi-step phase-shifting algorithm based on extended averaging technique and its error suppression characteristics comparison[J]. Acta Photonica Sinica, 2014, 43(4): 0426001.