基于激光干涉的电容位移传感器非线性误差标定方法 下载: 568次
王大鹏, 金星, 周伟静, 李南雷. 基于激光干涉的电容位移传感器非线性误差标定方法[J]. 激光与光电子学进展, 2017, 54(10): 101203.
Wang Dapeng, Jin Xing, Zhou Weijing, Li Nanlei. Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(10): 101203.
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王大鹏, 金星, 周伟静, 李南雷. 基于激光干涉的电容位移传感器非线性误差标定方法[J]. 激光与光电子学进展, 2017, 54(10): 101203. Wang Dapeng, Jin Xing, Zhou Weijing, Li Nanlei. Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(10): 101203.