飞秒激光参数对硅表面微结构影响的研究
罗坤, 陈向前, 彭滟, 朱亦鸣. 飞秒激光参数对硅表面微结构影响的研究[J]. 光学仪器, 2016, 38(5): 402.
LUO Kun, CHEN Xiangqian, PENG Yan, ZHU Yiming. Study of the effects of femtosecond laser peak power to silicon micro-structure[J]. Optical Instruments, 2016, 38(5): 402.
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罗坤, 陈向前, 彭滟, 朱亦鸣. 飞秒激光参数对硅表面微结构影响的研究[J]. 光学仪器, 2016, 38(5): 402. LUO Kun, CHEN Xiangqian, PENG Yan, ZHU Yiming. Study of the effects of femtosecond laser peak power to silicon micro-structure[J]. Optical Instruments, 2016, 38(5): 402.
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