高精度半导体激光打标机F-θ镜头设计 下载: 525次
李圆圆, 王春艳, 王志强. 高精度半导体激光打标机F-θ镜头设计[J]. 应用光学, 2020, 41(1): 202.
Yuanyuan LI, Chunyan WANG, Zhiqiang WANG. F-θ lens design for high-precision semiconductor laser marking machine[J]. Journal of Applied Optics, 2020, 41(1): 202.
[1] ASTARITA A, GENNA S, LEONE C, , et al. Study of the laser marking process of cold sprayed titanium coatings on aluminium substrates[J]. Optics & Laser Technology, 2016, 83: 168-176.
[2] 韩仲夏. 激光技术在半导体行业中的应用[J]. 无线互联科技, 2018(8): 140-141.
HAN Zhongxia. Application of laser technology in the semiconductor industry[J]. Wireless Internet Technology, 2018(8): 140-141.
[3] JIN K H, YAHANG J S, PARK C S, et al.Telecentric ftheta lens f highspeed terahertz reflection three dimensional imaging[C]. New Yk: IEEE, 2014: 12.
[4] YUREVICH V I, GRIMM V A, AFONYUSHKIN A A, , et al. Optical design and performance of f-theta lenses for high-power and high-precision applications[J]. SPIE, 2015, 9626: 1-13.
[5] 赵鑫. YAG激光打标机F-theta透镜的光学设计[J]. 无线互联科技, 2016, 7(4): 1-2.
ZHAO Xin. Optical design of F-theta lens for YAG laser marking machine[J]. Wireless Internet Technology, 2016, 7(4): 1-2.
[6] 李勇, 程潇潇. 大幅面CO2激光打标机F-
LI Yong, CHENG Xiaoxiao. Design of F-
[7] 赵鑫. CO2激光打标机F-theta透镜的光学设计[J]. 时代农机, 2016, 43(6): 77-78.
ZHAO Xin. Optical design of CO2 laser marking machine F-theta lens[J]. Times Agricultural Machinery, 2016, 43(6): 77-78.
[8] 周燕, 沈涛. 多波长广角F-theta透镜光学设计[J]. 应用光学, 2017, 38(4): 533-537.
[9] 付敏敏, 陈培锋, 王英, , et al. 超广角大工作面F-theta镜头的光学设计[J]. 应用光学, 2011, 32(6): 1083-1087.
[10] 苏阳, 安志勇, 李琦, , et al. 广角大相对孔径F-θ透镜光学设计[J]. 应用光学, 2015, 36(3): 376-380.
[11] 王文生.现代光学系统设计[M]. 北京: 国防工业出版社, 2016: 196208.
[12] 刘喆, 刘海鸥. 基于ZEMAX的F-
[13] 贾德伟, 卢艳丽, 胡婷婷. SrTiO3光催化材料的研究进展[J]. 材料导报, 2014, 28(3): 8-11.
JIA Dewei, LU Yanli, HU Tingting. Research progress of SrTiO3 photocatalytic materials[J]. Material Guide, 2014, 28(3): 8-11.
[14] 王航, 张国玉, 王远, , et al. 高轨道准直式红外地球模拟光学系统设计[J]. 光学仪器, 2014, 36(1): 26-27.
WANG Hang, Zhang Guoyu, WANG Yuan, . Design of optical system for high orbit collimating infrared earth simulator[J]. Optical Instruments, 2014, 36(1): 26-27.
李圆圆, 王春艳, 王志强. 高精度半导体激光打标机F-θ镜头设计[J]. 应用光学, 2020, 41(1): 202. Yuanyuan LI, Chunyan WANG, Zhiqiang WANG. F-θ lens design for high-precision semiconductor laser marking machine[J]. Journal of Applied Optics, 2020, 41(1): 202.