Author Affiliations
Abstract
1 Anhui Province Key Laboratory of Aerospace Structural Parts Forming Technology and Equipment, Institute of Industry and Equipment Technology, Hefei University of Technology, Hefei 230009, China
2 Caltech Optical Imaging Laboratory, Andrew and Peggy Cherng Department of Medical Engineering, California Institute of Technology, Pasadena, CA 91125, USA
3 Hefei National Laboratory for Physical Sciences at the Microscale and CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
A ring-shaped focus, such as a focused vortex beam, has played an important role in microfabrication and optical tweezers. The shape and diameter of the ring-shaped focus can be easily adjusted by the topological charge of the vortex. However, the flow energy is also related to the topological charge, making the individual control of diameter and flow energy of the vortex beam impossible. Meanwhile, the shape of the focus of the vortex beam remains in the hollow ring. Expanding the shape of focus of structural light broadens the applications of the vortex beam in the field of microfabrication. Here, we proposed a ring-shaped focus with controllable gaps by multiplexing the vortex beam and annular beam. The multiplexed beam has several advantages, such as the diameter and flow energy of the focal point can be individually controlled and are not affected by the zero-order beam, and the gap size and position are controllable.
microfabrication femtosecond laser structural beams microring Chinese Optics Letters
2022, 20(2): 023801
1 中国科学技术大学精密机械与精密仪器系, 安徽 合肥 230026
2 合肥工业大学工业与装备技术研究院, 安徽 合肥 230009
提出了基于空间光调制器(SLM)的飞秒激光双模式双光子聚合加工方式。通过在空间光调制器上加载相应的全息图, 可以实现焦点控制扫描加工和图形化曝光加工模式。 这两种加工模式不但可以保证加工质量, 而且能够提高双光子聚合加工的效率。采用这两种不同的模式, 分别加工了里约奥运会会徽和不同形状的图案, 验证了这两种加工方式在微纳加工领域的可行性。
激光技术 飞秒激光 空间光调制器 焦点控制模式 图形化曝光 微纳加工 中国激光
2018, 45(10): 1001005
中国科学技术大学精密机械与精密仪器系, 安徽 合肥 230026
针对飞秒激光微纳加工技术中激光与加工样品相对运动的控制、聚焦光斑能量的控制中存在的问题, 提出一种基于硅基液晶空间光调制器动态加载计算全息图同时控制焦点位置和能量的新型加工方法。该方法通过加载叠加闪耀光栅的全息图, 控制单点运动来扫描加工二维结构, 无需平台移动。进一步控制全息图的挖空区域, 可以调制入射光斑的能量, 进而控制被加工点阵的形貌。利用这一加工效应, 成功实现各种可控环状结构的加工, 并在光学显微镜下测试达到相应效果, 证明这种加工方法在飞秒激光微纳加工领域具有可行性。
激光制造 飞秒激光 双光子聚合加工 空间光调制器 计算全息