Peipei Ma 1,2Jun Zheng 1,2,*Xiangquan Liu 1,2Zhi Liu 1,2[ ... ]Buwen Cheng 1,2
Author Affiliations
Abstract
1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
In this work, a two-step metal organic chemical vapor deposition (MOCVD) method was applied for growing β-Ga2O3 film on c-plane sapphire. Optimized buffer layer growth temperature (TB) was found at 700 °C and the β-Ga2O3 film with full width at half maximum (FWHM) of 0.66° was achieved. A metal?semiconductor?metal (MSM) solar-blind photodetector (PD) was fabricated based on the β-Ga2O3 film. Ultrahigh responsivity of 1422 A/W @ 254 nm and photo-to-dark current ratio (PDCR) of 106 at 10 V bias were obtained. The detectivity of 2.5 × 1015 Jones proved that the photodetector has outstanding performance in detecting weak signals. Moreover, the photodetector exhibited superior wavelength selectivity with rejection ratio (R250 nm/R400 nm) of 105. These results indicate that the two-step method is a promising approach for preparation of high-quality β-Ga2O3 films for high-performance solar-blind photodetectors.
MOCVD two-step growth β-Ga2O3 solar-blind photodetector responsivity 
Journal of Semiconductors
2024, 45(2): 022502
吕松竹 1赵建行 1,*周姚 1曹英浩 1[ ... ]周见红 1,3,**
作者单位
摘要
1 长春理工大学 光电工程学院, 吉林 长春  130022
2 哈尔滨工业大学 物理学院, 哈尔滨 黑龙江  150001
3 长春理工大学 光电测量和光信息传输技术教育部重点实验室, 吉林 长春  130022
由于硫系玻璃具有良好的光学性质,在非线性光学等方面研究广泛,但基于硫系玻璃光电探测器的相关研究却很少。本文利用真空共热蒸发技术制备了不同掺银比例的硫系玻璃薄膜作为半导体膜层结构,并设计构建了金属-绝缘体-半导体结构的自供电光电探测器,探究了该光电探测器的响应光谱范围。结果表明,该探测器对可见光到近红外区域的光均有响应。针对掺银硫系玻璃光电探测器在635 nm波长激光下,研究了探测器响应电压与激发功率之间的关系。当激光功率小于10 mW时,探测器响应电压与激发功率线性相关;当激光功率大于10 mW时,探测器响应电压逐渐饱和。探测器的上升和衰减时间分别为3.932 s和1.522 s。本研究为硫系玻璃材料在自供电光电探测器领域的应用提供了证明。
硫系玻璃 光电探测器 金属-绝缘体-半导体 chalcogenide glass photodetector metal-insulator-semiconductor 
发光学报
2024, 45(2): 343
作者单位
摘要
1 太原学院 材料与化学工程系,山西太原030032
2 哈尔滨工业大学 材料科学与工程学院,黑龙江哈尔滨150001
为了实现在无外部供能下对紫外光的有效探测,基于Ag修饰的Bi2O3纳米块(Ag/Bi2O3)纳米块制备了自供能紫外探测器。通过煅烧法制备Bi2O3纳米块,随后采用室温溶液法在其表面沉积Ag纳米粒子,进而成功制备了Ag/Bi2O3纳米块,且对所制备样品的晶体结构和微观形貌等进行了表征。结果表明,Ag/Bi2O3纳米块的平均尺寸约为1 μm,且Ag纳米粒子随机分布在Bi2O3纳米块表面。将涂覆Ag/Bi2O3纳米块的FTO作为工作电极,并进一步构建了自供能紫外探测器。在365 nm的紫外光照射下,Ag/Bi2O3纳米块紫外探测器能在零偏压下实现对紫外光的快速检测,这证实其具有自供能特性。相比于Bi2O3纳米块紫外探测器,Ag/Bi2O3纳米块紫外探测器的光电流得到明显提升,上升和下降时间分别缩短至29.1 ms和40.2 ms,并具有良好的循环稳定性。
紫外探测器 Bi2O3纳米块 Ag纳米粒子 自供能探测 ultraviolet photodetector Bi2O3 nanoblocks Ag nanoparticles self-powered detection 
光学 精密工程
2024, 32(5): 653
袁兆林 1,2,3,*吴永炜 1余璐瑶 1何剑锋 1,2,3[ ... ]路鹏飞 1,2,3
作者单位
摘要
1 东华理工大学 信息工程学院,江西南昌33003
2 东华理工大学 软件学院,江西南昌330013
3 江西省核地学数据科学与系统工程技术研究中心,江西南昌001
为了获得高性能和低成本的氧化锌(ZnO)基紫外光探测器,使用Ga掺杂ZnO(ZnO∶Ga)作为光敏层,采用水热法合成了不同Ga掺杂浓度ZnO∶Ga微米棒,Ga与Zn的原子比分别为0%(未掺杂),0.5%,1%,2%和4%。使用X射线衍射仪(XRD)测试所有样品的晶体结构,发现它们都为六方纤锌矿结构的ZnO。采用扫描电子显微镜(SEM)观察它们的形貌,都呈现棒状结构。进一步,制备叉指图案氟掺杂的氧化锡(FTO)导电玻璃基底,将不同Ga掺杂浓度ZnO∶Ga微米棒分别涂覆在FTO上,得到5种简单结构的紫外光探测器,系统研究了它们的性能。结果表明:所有ZnO∶Ga微米棒紫外光探测器对365 nm紫外光表现出良好的响应。其中,1% Ga掺杂ZnO∶Ga微米棒紫外光探测器性能最佳,经计算,在365 nm波长处,它的响应度、增益和比探测率分别为13.13 A/W (5 V),44.63 (5 V),3.31×1012 Jones,响应时间和衰减时间分别为12.3 s和36.4 s。说明在ZnO微米棒中进行合适Ga掺杂能有效提高紫外光探测器的性能。该研究有助于基于ZnO∶Ga材料的紫外光探测器及相关器件发展。
紫外光探测器 镓掺杂氧化锌 微米棒 水热法 响应度 ultraviolet photodetector Ga-doped ZnO microrods hydrothermal method responsivity 
光学 精密工程
2024, 32(5): 643
Author Affiliations
Abstract
1 Jinan University, College of Physics & Optoelectronic Engineering, Institute of Nanophotonics, Guangdong Provincial Key Laboratory of Nanophotonic Manipulation, Guangzhou, China
2 Tsinghua University, Shenzhen International Graduate School, State Key Laboratory of Chemical Oncogenomics, Shenzhen, China
3 Jinan University, College of Life Science and Technology, Guangzhou, China
Narrowband photodetection is an important measurement technique for material analysis and sensing, for example, nondispersive infrared sensing technique. Both photoactive material engineering and nanophotonic filtering schemes have been explored to realize wavelength-selective photodetection, while most devices have a responsive bandwidth larger than 2% of the operating wavelength, limiting sensing performance. Near-infrared photodetection with a bandwidth of less than 0.2% of the operating wavelength was demonstrated experimentally in Au/Si Schottky nanojunctions. A minimum linewidth of photoelectric response down to 2.6 nm was obtained at a wavelength of 1550 nm by carefully tailing the absorptive and radiative loss in the nanostructures. Multiple functions were achieved on chip with the corrugated Au film, including narrowband resonance, light harvesting for sensing and photodetection, and electrodes for hot electron emission. Benefiting from such a unity integration with in situ photoelectric conversion of the optical sensing signal and the ultranarrowband resonance, self-contained on-chip biosensing via simple intensity interrogation was demonstrated with a limit of detection down to 0.0047% in concentration for glucose solution and 150 ng / mL for rabbit IgG. Promising potential of this technique is expected for the applications in on-site sensing, spectroscopy, spectral imaging, etc.
plasmonics hot electron sensor photodetector spectroscopy 
Advanced Photonics
2024, 6(2): 026007
作者单位
摘要
太原理工大学光电工程学院,山西 太原 030024
制备基于二维钙钛矿(PEA)2(MA)4Pb5I16[PEA为C6H5(CH2)NH3,MA为CH3NH3]的垂直结构光电探测器,当二维钙钛矿薄膜厚度为280 nm时,器件的亮电流最大,500 nm处外量子效率达到90%,响应率达到0.37 A/W,探测率达到3.4×1012 Jones(1 Jones=1 cm?Hz1/2/W)。当二维钙钛矿薄膜厚度减小时,器件的响应时间没有持续减小,而在其厚度为80 nm时器件的响应时间最短,这是受载流子渡越时间和钙钛矿薄膜质量双重影响下的结果。在二维钙钛矿薄膜厚度为80 nm的基础上,通过减小器件的有效面积,其最终实现了113 ns的响应时间。本工作对推动低成本快速响应光电探测器的发展有着重要意义。
光电探测器 二维钙钛矿 快速响应 垂直结构 
激光与光电子学进展
2024, 61(5): 0504003
Author Affiliations
Abstract
1 Institute of Physics and Electronic Information, Yunnan Normal University, Kunming 650500, China
2 Yunnan Key Laboratory of Optoelectronic Information Technology, Kunming 650500, China
3 Key Laboratory of Advanced Technique & Preparation for Renewable Energy Materials, Ministry of Education, Yunnan Normal University, Kunming 650500, China
Organic–inorganic hybrid perovskite formamidinium lead bromide nanosheet (FAPbBr3 NS) is regarded as a superior substance used to construct optoelectronic devices. However, its uncontrollable stability seriously affects its application in the field of photodetectors. In this paper, FAPbBr3 is combined with cadmium sulfide nanobelt (CdS NB) to construct a hybrid device that greatly improves the stability and performance of the photodetector. The response of the FAPbBr3 NS/CdS NB detector under 490 nm light illumination reaches 5712 A/W, while the response of the FAPbBr3 photodetector under equivalent conditions is only 25.45 A/W. The photocurrent of the FAPbBr3 NS/CdS NB photodetector is nearly 80.25% of the initial device after exposure to air for 60 days. The difference in electric field distribution between the single material device and the composite device is simulated by the finite-difference time-domain method. It shows the advantages of composite devices in photoconductive gain and directly promotes the hybrid device performance. This paper presents a new possibility for high stability, fast response photodetectors.
organic–inorganic hybrid perovskite stability finite-difference time-domain photodetector 
Chinese Optics Letters
2024, 22(2): 022502
高芳亮 1陈坤 1刘青 1王幸福 1[ ... ]李述体 1,**
作者单位
摘要
1 华南师范大学半导体科学与技术学院,广东 广州 510631
2 东莞南方半导体科技有限公司,广东 东莞 523781
界面工程是提高光电探测器性能的有效方法之一。报道了基于界面工程调控的石墨烯(Gr,2D)/GaN(3D)范德瓦耳斯异质结紫外光电探测器。GaN吸收光子产生电子空穴对,并在内建电场作用下发生分离。其中,光生空穴利用隧穿效应向Gr一侧迁移,而光生电子向GaN一侧迁移。在较高的电场驱动下,载流子将发生碰撞,造成光电流倍增,使得器件的光吸收效率与光电转化效率有明显提升。因此,器件在-2 V偏压条件和5 μW/cm2紫外光照射下,展示出较高的响应度(395.2 A/W)和较大的探测率(4.425×1015 Jones)值。该研究丰富了界面工程技术在Gr基紫外光电探测器的应用,为制备高性能紫外探测器提供了可能。
氮化镓 二维/三维 金属有机化学气相沉积 紫外探测器 
激光与光电子学进展
2024, 61(3): 0304001
谭伊玫 1,2徐英莹 1,3张硕 2刘雁飞 2[ ... ]唐鑫 1,*
作者单位
摘要
1 北京理工大学光电学院,北京 100081
2 中芯热成科技(北京)有限责任公司,北京 100176
3 中国计量科学研究院,北京 100029
红外探测及成像具有广泛用途,在红外制导、夜视侦察、安防监控及危化品探测等方面发挥了重要作用。现有红外成像焦平面大多由碲镉汞、二类超晶格、锑化铟等块体半导体材料制成,通过倒装键合的方法实现块体材料与硅基读出电路的信号传输。倒装键合对准困难、操作复杂、对设备依赖性较强,难以满足焦平面阵列规模不断增加和像元尺寸不断减小的制备需求。为解决红外焦平面阵列规模提升的瓶颈,采用碲化汞胶体量子点,通过液相旋涂的方法,突破倒装键合限制,实现硅基读出电路直接片上集成。所制备焦平面阵列规模达1280×1024,像元间距为15 µm,80 K工作温度下探测截止波长为4.8 µm,响应非均匀性为9%,有效像元率为99.96%,最低噪声等效温差达30 mK,展现了良好的成像性能。
焦平面阵列成像 胶体量子点 百万像素 捕获型探测器 
激光与光电子学进展
2024, 61(2): 0211027
Peng Cao 1,2Tiancai Wang 1,3Hongling Peng 1,4Zhanguo Li 5[ ... ]Wanhua Zheng 1,2,3,4,*
Author Affiliations
Abstract
1 Laboratory of Solid-State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 College of Electronic and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
4 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
5 School of Physics, Changchun Normal University, Changchun 130022, China
6 Physics Department, Lancaster University, Lancaster LA1 4YB, UK
In this paper, we demonstrate nBn InAs/InAsSb type II superlattice (T2SL) photodetectors with AlAsSb as the barrier that targets mid-wavelength infrared (MWIR) detection. To improve operating temperature and suppress dark current, a specific Sb soaking technique was employed to improve the interface abruptness of the superlattice with device passivation using a SiO2 layer. These result in ultralow dark current density of 6.28×10-6 A/cm2 and 0.31 A/cm2 under -600 mV at 97 K and 297 K, respectively, which is lower than most reported InAs/InAsSb-based MWIR photodetectors. Corresponding resistance area product values of 3.20×104 Ω ·cm2 and 1.32 Ω ·cm2 were obtained at 97 K and 297 K. A peak responsivity of 0.39 A/W with a cutoff wavelength around 5.5 µm and a peak detectivity of 2.1×109 cm·Hz1/2/W were obtained at a high operating temperature up to 237 K.
mid-wavelength infrared photodetector InAs/InAsSb superlattice high operating temperature dark current 
Chinese Optics Letters
2024, 22(1): 012502

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