Presented is a novel way to combine snapshot compressive imaging and lateral shearing interferometry in order to capture the spatio-spectral phase of an ultrashort laser pulse in a single shot. A deep unrolling algorithm is utilized for snapshot compressive imaging reconstruction due to its parameter efficiency and superior speed relative to other methods, potentially allowing for online reconstruction. The algorithm’s regularization term is represented using a neural network with 3D convolutional layers to exploit the spatio-spectral correlations that exist in laser wavefronts. Compressed sensing is not typically applied to modulated signals, but we demonstrate its success here. Furthermore, we train a neural network to predict the wavefronts from a lateral shearing interferogram in terms of Zernike polynomials, which again increases the speed of our technique without sacrificing fidelity. This method is supported with simulation-based results. While applied to the example of lateral shearing interferometry, the methods presented here are generally applicable to a wide range of signals, including Shack–Hartmann-type sensors. The results may be of interest beyond the context of laser wavefront characterization, including within quantitative phase imaging.

在光刻投影物镜的畸变检测中，位移测量误差是光刻投影物镜畸变检测的重要误差源之一，深度分析误差源并减小误差项，可提高光刻投影物镜的畸变检测精度。本文将运动台的定位与测量技术相结合，着重分析利用夏克-哈特曼波前传感器对投影物镜进行畸变检测时像质检测台的位移测量误差。并以一套投影物镜像质检测台为例，对其在投影物镜畸变检测中的位移测量误差进行分析，利用该像质检测台对某一投影物镜进行畸变检测，畸变检测结果约80 nm，其中该像质检测台的位移测量误差会给畸变检测结果带来约22 nm的不确定度。

Usually, a multilens optical system is composed of multiple undetectable sublenses. Wavefront of a multilens optical system cannot be measured when classical transmitted phase measuring deflectometry (PMD) is used. In this study, a wavefront measuring method for an optical system with multiple optics is presented based on PMD. A paraxial plane is used to represent the test multilens optical system. We introduce the calibration strategy and mathematical deduction of gradient equations. Systematic errors are suppressed with an N-rotation test. Simulations have been performed to demonstrate our method. The results showing the use of our method in multilens optical systems, such as the collimator and single-lens reflex camera lenses show that the measurement accuracy is comparable with those of interferometric tests.

随着波前测量技术的发展，具有多光谱通道的大口径波前测量系统成为波前测量领域的研究热点。设计了一种大口径多光谱通道波前测量系统，主要由前置RC缩束系统、调光组件、分光组件和波前传感器等组成，有效口径为450 mm，工作波段为0.5～0.8 μm、0.9～1.7 μm和3～5 μm。给出了光学系统的设计参数，描述了系统中光学元件的参数选择，运用Zemax软件完成了光学系统的建模和仿真。进行了机械系统的方案设计，并完成了系统的光机热集成分析。测试了大口径多光谱通道波前测量系统的各项参数，结果表明该波前测量系统的有效口径大于450 mm，在?10～50 ℃工作环境下，对可见光、近红外、中红外波段的波前均可实现高精度实时稳定测量，系统的波前测量稳定性优于0.05λ（RMS，λ=532 nm）。

对平行平板双光路横向剪切干涉仪的装调进行了研究，提出了一种矫正两个平行平板之间角度误差的方法.输出激光的波前采用Zernike多项式拟合，经过理论推导，发现两个方向差分波前求解出的倾斜像散之差与平行平板的角度误差存在线性关系，利用两个方向倾斜像散之差来矫正两个平行平板之间的角度误差.在平行平板横向剪切干涉仪的装调过程中使两个方向差分波前的倾斜像散之差为零即可以使两个方向的平行平板之间的角度误差值为零.进一步地从实验上证明了这个线性关系，对于所用的实验系统，当离焦像差为-3.224 7±0.001 8，两个方向差分波前的倾斜像散之差波动范围为±2.0×10^-3时，平行平板的角度误差可以控制在8.82″之内，高阶像差对平行平板的角度误差调节精度的影响约为1.63″.该方法具有装调简单、精确度高，易于流程化操作的优点.