利用射频磁控溅射方法在不同衬底上制备出掺Y2O3 8 %的YSZ薄膜, 用X射线衍射、原子力显微镜(AFM)、扫描电子显微镜和透射光谱测定薄膜的结构、表面特性和光学性能, 研究了退火对薄膜结构和光学性能的影响。结果表明：随着退火温度的升高, 薄膜结构依次从非晶到四方相再到四方和单斜混合相转变, AFM分析显示薄膜表面YSZ颗粒随退火温度升高逐渐增大, 表面粗糙度相应增大, 晶粒大小计算表明, 退火温度的提高有助于薄膜的结晶化, 退火温度从400 ℃到1100 ℃变化范围内晶粒大小从20.9 nm增大到42.8 nm; 同时根据ISO11254-1激光损伤测试标准对光学破坏阈值进行了测量, 发现与其他电子束方法制备的YSZ薄膜损伤阈值结果比较, 溅射法制备的薄膜损伤阈值有了一定程度的提高。

The sol-ge1 organicmodified silica(SiO2:(CH3)2SiO=1:1)moisture-resistant(MR)and porous silicaantireflective (AIR)coatings were studied and developed for laser phosphate glasses in the national high laser systems.The stability of viscosity of MR coa ting solution an d AR colloidal suspension was researched .The surface reflection of coated phosphate glasses decre~ses 6.5％-7.5％.The laser damage threshold of coatings was 12 J/cm2，1 053 nm/1 ns.The coatings roughness(RMS) was 2.523 nm.

Using di-ethoxy-silicane as precursor，a colloidal prepolymer was developed from sol-gel process. With silica colloid as modifier，the modified moisture-resistant films were prepared on neodymium-doped phosphate glass by spin coating. When the mole ratio of di-ethoxy-silicane to silica was 1: 1，the films after cure had improved abrasion-resistance. RMS was 1. 245 nm，while laser-damage threshold value more than 15 J / cm2 at the condition of 1 053 nm，1 ns. After staying in a closed circumstance at 80 ℃ and 95%RH，the films had approximately constant transmission and contact angle. It indicates that the films have a stable hydrophobic structure，good moisture-resistance，improved abrasion-resistant feature and longer service life.

Organosilicone composite antireflective (AR) coating was successfully prepared for Ti-sapphire crystals by sol-gel process from precursors of tetraethoxysilane [Si(OC2H5)4, TEOS] and methyltriethoxysilane [CH3Si(OC2H5)3, MTEOS]. This AR coating possessed prominent AR effect within the output waveband (750～850 nm) of Ti-sapphire laser with average transmission above 98.6%, and its surface homogeneity met the requirements of the laser wavefront. The laser induced damage threshold (LIDT) of 2.2 J/cm2 was obtained at 800 nm with the pulse duration of 300 ps for this AR coating on Ti-sapphire crystals, which made it suitable for the optics of ultrashort pulse pico- and femtosecond high power lasers. Further, investigations on the performance of coating solution showed that the viscosity and coating refractive index both increased along with MTEOS prepolymer content, and effect of bake temperature on the latter was very small.

(CH3)2Si(OC2H5)2 as precursor, a sol of good stability is prepared by sol-gel method and organic synthesization. After the sol is coated it on phosphate laser glass by rotating way, moistureproof film is worked out, having a transmittance of 96.5% after heated. The film has a good morphology, roughness of mean square (RMS) of 1.659 nm and roughness of average (RA) of 1.321 nm. The damaged threshold of the moistureproof film is high to 10～14 J/cm2, tested by a laser of wavelength of 1053 nm and pulse width of 1 ns. In the period of 5 years on “Shenguang Ⅱ” high power laser equipment, it behaves good moistureproof performance , and tryouts on “Shenguang Ⅲ” model.

以硅酸四乙酯(TEOS)和甲基三乙氧基硅烷(MTEOS)为前驱材料,用溶胶-凝胶(sol-gel)方法在钛宝石表面制备得到均匀性良好且具有高激光损伤阈值的有机硅复合凝胶增透膜。膜层在钛宝石激光器输出波段(750～850 nm)的增透效果显著,其平均透过率超过98.6%;激光破坏阈值为2.2 J/cm2(800 nm,300 ps);膜层表面均匀性达到激光波面的要求,在皮秒、飞秒超短脉冲高功率激光领域具有应用价值。溶胶的性能测试结果表明,溶胶粘度和成膜折射率均随溶液中CH3SiO1.5溶胶体含量的增加而增大,而膜层折射率受烘烤温度影响较小。

以(CH3)2Si(OC2H5)2为前驱体,采用溶胶凝胶与有机合成相结合的方法,制得稳定性良好的涂膜液。采用旋转涂膜法在掺钕磷酸盐激光玻璃棒端面涂制防潮膜,膜层固化后透过率达96.5%,获得的膜层表面粗糙度优良,均方根表面粗糙度(RMS)为1.659 nm,平均粗糙度(RA)平均为1.321 nm[在激光波长1053 nm,脉冲宽度1 ns条件下膜层的激光破坏阈值可达10～14 J/cm2。经过“神光Ⅱ”高功率激光器物理实验运行,膜层使用期为五年,并且已经在我国“神光Ⅲ”原型装置上试用。

通过数值计算比较研究了静止、同心旋转、偏心旋转三种模式下高能激光器窗口工作过程中温度场和应力场的特征及其演变规律.研究表明,旋转式激光器窗口不但可使温度场和应力场轴对称化,且可降低最高温升、最大拉应力和最大剪应力;一定偏心距的偏心旋转可以起到消去拉应力、减小剪切应力的作用,从而使激光器窗口的抗激光损伤的能力有较大幅度的提高.