光学 精密工程, 2019, 27 (2): 334, 网络出版: 2019-04-02
静电驱动MOEMS保险机构的设计与试验
Design and test of electrostatic driving MOEMS arming device
微光机电系统 引信 保险机构 静电微驱动器 光路耦合 Micro-Opto-Electro-Mechanical System(MOEMS) fuze arming device micro electrostatic driving mechanism optical path coupled
摘要
为了提高引信状态控制的安全性, 增强其抵抗引信内、外强电磁干扰的能力, 提出了一种应用于微小型引信安全系统的硅基微光机电保险机构。该机构采用光纤作为过程能量传输的载体, 通过静电驱动方式实现对光纤光路错位与对准的控制, 达到引信安全与解除保险的目的。设计了MOEMS保险机构的总体结构和耦合光路, 并对它进行SOI+DRIE工艺设计和加工。通过开展静电微驱动器性能测试试验和光路性能测试试验得出, 静电微驱动器能够实现130 μm 的大位移输出, MOEMS保险机构的解除保险时间和恢复保险时间分别为13 ms和5 ms, 光能传输效率为461%。所设计的MOEMS保险机构能够满足功能要求, 具备天然的抗电磁干扰能力, 有效提高了引信的本征安全性。
Abstract
To improve the state control safety of a fuze and enhance its ability to resist electromagnetic interference, this paper proposes a silicon-based Micro-Opto-Electro-Mechanical Systems (MOEMS) arming device used in the miniature safety and arming system of a fuze. The device adopts two optical fibers as the carriers of energy transmission, and their misalignment and alignment are controlled through an electrostatic driving mechanism, which determines the safety and arming state of the fuze. The overall structure and coupled optical path of the MOEMS arming device are designed, and subsequently, it is manufactured through a silicon-on-insulator deep reactive-ion etching process. Through experiments evaluating the performances of the electrostatic driving mechanism and optical path, it is concluded that the displacement output of the electrostatic driving mechanism can reach 130 μm, the arming time and restore safety time are 13 ms and 5 ms, respectively, and the light energy transfer efficiency is 46.1%. The MOEMS arming device can satisfy the functional requirements of a fuze and it can have natural resistance to electromagnetic interference, which improves the intrinsic safety of the fuze.
刘加凯. 静电驱动MOEMS保险机构的设计与试验[J]. 光学 精密工程, 2019, 27(2): 334. LIU Jia-kai. Design and test of electrostatic driving MOEMS arming device[J]. Optics and Precision Engineering, 2019, 27(2): 334.