光学 精密工程, 2019, 27 (3): 561, 网络出版: 2019-05-30
结合激光准直的二维转角动态测量系统
Two-dimensional rotation angle dynamic measurement system combining laser collimation
激光准直 二维转角 动态测量 光斑位置 laser collimation two-dimensional rotation angle dynamic measurement spot location
摘要
为了克服现有二维转角动态测量方法结构复杂、成本昂贵的缺点, 提出了结合激光准直的二维转角动态测量方法。首先, 根据二维转角测量的关键问题提出基于激光准直的测量方法, 采用准直激光作为测量基准, 以远端的位置探测器作为检测器件。接着, 设计测量系统和各组成模块, 根据测量要求对系统中的关键模块进行设计和优化。然后, 具体设计系统中的测量算法, 完成测量模型建立。最后, 在±2°范围内进行实验测试和分析。实验结果表明: 系统可动态测量, 稳定性好, 测量重复性误差为1 μrad, X轴非线性误差为1.8%, Y轴非线性误差为1.7%, 动态带载响应频率在±0.01°内优于200 Hz, 基本满足二维转角测量的高精度、高重复性、高稳定性的要求。
Abstract
To dynamically measure a two-dimensional rotation angle and overcome the shortcomings of a complicated structure and high costs, a method based on laser collimation was proposed and a measurement system was established. First, a method was proposed based on the key measurement requirements. A collimated laser was used as a measurement datum and a remote position detector as a detection device. Second, a measurement system was developed, each module was designed, and the main modules were optimized. Third, the model was established completely after an algorithm was produced. Finally, tests were performed and the obtained data were analyzed within ± 2°. The experimental results show that the stability of the system is positive, the measurement repeatability error is 1 μrad, the X-and Y-axis nonlinearity errors are 1.8% and 1.7%, respectively, and the dynamic band response frequency is better than 200 Hz within ± 0.01°. The study confirms that the system basically offers high precision, high repeatability, high stability, and a dynamic measurement of a two-dimensional rotation angle.
楼志斌, 赵辉, 刘权, 郑超, 陶卫. 结合激光准直的二维转角动态测量系统[J]. 光学 精密工程, 2019, 27(3): 561. LOU Zhi-bin, ZHAO Hui, LIU Quan, ZHENG Chao, TAO Wei. Two-dimensional rotation angle dynamic measurement system combining laser collimation[J]. Optics and Precision Engineering, 2019, 27(3): 561.