以八水氧氯化锆(ZrOCl2?8H2O)为原料制备前驱体溶液，采用旋涂工艺制备ZrO2薄膜，并对其进行还原氮化。利用XRD、FE-SEM、UV-Vis-Nir和Raman测试薄膜结构、光学性能及SERS效应。结果表明，还原氮化后薄膜中出现了氮氧化合物，颗粒明显，薄膜厚度约为0.77 μm。薄膜的紫外可见近红外光谱在350~650 nm附近展现出较强的吸收。利用R6G作为探针分子研究了薄膜的SERS效应，结果表明，还原氮化后的氧化锆薄膜拉曼增强效应显著提升，拉曼增强因子为2.479×102。

The precursor solution was prepared by using zirconium oxychloride octahydrate (ZrOCl2?8H2O) as the raw material, and the ZrO2 film was prepared by spin coating process and then processed via reduction and nitridation. The film structure, optical properties and SERS effect were tested by XRD, FE-SEM, UV-Vis-Nir and Raman. The results show that nitrogen oxides appeare in the film via reduction and nitridation, the particles are obvious, and the thickness of the film is about 0.77 μm. There is a strong absorption peak near 350 nm to 650 nm in the ultraviolet-visible-near-infrared spectrum of the film. The SERS effect of the film was studied using R6G as a probe molecule, the results show that the SERS effect of the zirconia film is significantly improved via reduction and nitridation, and the Raman enhancement factor is 2.479×102.