1 State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
3 School of Microelectronics, Shanghai University, Shanghai 201800, China
4 Shanghai Industrial μTechnology Research Institute, Shanghai 201800, China
5 Shanghai Mingkun Semiconductor Co., Ltd., Shanghai 201800, China
6 e-mail: ouxin@mail.sim.ac.cn
7 e-mail: yan.cai@mail.sim.ac.cn