1 State Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
3 School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
4 State Key Laboratory of Information Photonics and Optical Communications and School of Science, Beijing University of Posts and Telecommunications, Beijing 100876, China
5 United Microelectronics Center Co., Ltd., Chongqing 401332, China
6 China Academy of Space Technology (Xi’an), Xi’an 710100, China
7 e-mail: nnshi@semi.ac.cn
8 e-mail: ml@semi.ac.cn