为了测量被测物面的微观特征量及这些特征量间的关系, 提出基于数字微镜器件 (DMD)的跨尺度测量方法, 研究针对 DMD的控制方法及基于 DMD的测量策略, 在不对测量系统硬件做任何修改的前提下, 仅通过软件编程实现对 DMD结构光参数的改变, 理论上可实现从 0.1 μm到 1 mm的跨尺度测量。搭建了基于 DMD的跨尺度测量平台, 实验结果表明, 轴向测量精度与横向分辨力均可达到微米级, 可实现对表面微观结构的快速扫描。该方法可以较好地解决目前诸多表面形貌测量中存在的多尺度问题。

To clearly measure the surface topography of specimen and the relationship among specimens, a multi-scale measurement method based on Digital Micromirror Device (DMD) was proposed, and then a control method and measurement strategy of DMD were researched.Without any changes of measurement device, the parameters of structured light based on DMD could be controlled by software programming.Theoretically, different scale measurement for surface topography, from 0.1 μm level to 1 mm level, could be achieved.A multi-scale measurement device based on DMD has been set up, and the experiment results indicate that, the axial accuracy and transverse resolution of the device could achieve at 1μm level, and the microstructure could be scanned quickly.This multi-scale measurement method could be widely applied in surface topography measurement to solve some multi-scale problems.