蓝宝石衬底上生长的铝镓氮外延膜的应变分析
王雪蓉, 刘运传, 孟祥艳, 周燕萍, 王康, 王倩倩. 蓝宝石衬底上生长的铝镓氮外延膜的应变分析[J]. 半导体光电, 2016, 37(4): 524.
WANG Xuerong, LIU Yunchuan, MENG Xiangyan, ZHOU Yanping, WANG Kang, WANG Qianqian. Strain Analysis of AlGaN Epitaxial Film Grown on Sapphire Substrate[J]. Semiconductor Optoelectronics, 2016, 37(4): 524.
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王雪蓉, 刘运传, 孟祥艳, 周燕萍, 王康, 王倩倩. 蓝宝石衬底上生长的铝镓氮外延膜的应变分析[J]. 半导体光电, 2016, 37(4): 524. WANG Xuerong, LIU Yunchuan, MENG Xiangyan, ZHOU Yanping, WANG Kang, WANG Qianqian. Strain Analysis of AlGaN Epitaxial Film Grown on Sapphire Substrate[J]. Semiconductor Optoelectronics, 2016, 37(4): 524.
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