液晶与显示, 2017, 32 (2): 104, 网络出版: 2017-02-09
载盘预处理对纯铝薄膜小丘生成的影响
Effect of pretreatment of tray on hillock formation in pure Al films
图 & 表
肖亮, 张勋泽, 朴祥秀. 载盘预处理对纯铝薄膜小丘生成的影响[J]. 液晶与显示, 2017, 32(2): 104. XIAO Liang, ZHANG Xun-ze, PIAO Xiang-xiu. Effect of pretreatment of tray on hillock formation in pure Al films[J]. Chinese Journal of Liquid Crystals and Displays, 2017, 32(2): 104.