高精度干涉仪针孔空间滤波器研制
[1] TEJNIL M E,GOLDBERG K A. Phase-shifting point diffraction interferometer[J]. Opt. Lett.,1996,20(19): 1526-1528.
[2] LAI K F,GALLATIN G,DE KERKHOF M,et al.. New paradigm in lens metrology for lithographic scanner: evaluation and exploration[J]. SPIE,2004,5377: 160-170.
[3] TORN F J,JUN K G,YASUSHI M,et al.. Portable phase measuring interferometer using Shack-Hartmann method[J]. SPIE,2003,5038: 726-732.
[4] 刘友强,曹银花,潘飞,等.激光加工用半导体激光器的光束变换[J].光学 精密工程,2012,20(3): 455-461.
[5] 李世文,张秋慧,牛瑞华.激光对金属铜微孔加工的热力学过程研究[J].光谱学与光谱分析,2013,33(4): 899-902.
[6] 朱洪波, 李艳华, 郝明明,等.基于偏振复用技术的新型半导体激光加工光纤耦合模块[J].光学 精密工程,2013,21(5): 1137-1143.
[7] 刘峰,彭国良,杜太焦,等.切向气流对激光加热金属板非熔化穿孔效应的影响[J].中国光学,2013,6(3): 332-342.
[8] ZHANG J,PENG H Y,LIU Y,et al.. Fiber-coupled diode laser flexible processing source for metal sheet welding[J]. Chinese J. Luminescence,2012,33(8): 895-900.
[9] 于华杰,崔益民,王荣明.聚焦离子束系统原理、应用及进展[J].电子显微学报,2008,27(3): 243-248.
YU H J,CUI Y M,WANG R M. Principle, application and development of focused ion beam system[J]. J. Chinese Electron Microscope Society,2008,27(3): 243-248.(in Chinese)
[10] 张继成,唐永建,吴卫东.聚焦离子束系统在微米/纳米加工技术中的应用[J].材料导报,2006,20(增2): 40-46.
ZHANG J CH,TANG Y J, WU W D. Application of focused ion beam in micro/nanometer micromachining technology[J]. J. Materials,2006,20(supp 2): 40-46.(in Chinese)
[11] 张琨, 林罡, 刘刚,等.电子束光刻技术的原理及其在微纳加工与纳米器件制备中的应用[J].电子显微学报,2006, 25(2): 97-103.
ZHANG K,LIN G,LIU G,et al.. Principle of electron beam lithography and its application on the nanofabrication and nanodevice[J]. J. Chinese Electron Microscope Society,2006,25(2): 97-103.
[12] 齐克奇.光刻物镜波像差检测平台针孔对准装置的研制[J].长春理工大学学报(自然科学版),2012,35(4): 46-48.
QI K Q. Development of pinhole positioning device of wavefront aberration detecting stage for lithographic projection objective[J]. J. Changchun University of Science and Technology(Natural Science Edition),2012,35(4): 46-48.(in Chinese)
[13] 周孑民,朱再兴,谢东江,等.常功率平面热源法测试耐火材料热物性的研究[J].中南大学学报,2011,42(5): 467-1472.
ZHOU J M, ZHU Z X, XIE D J,et al.. Thermal physical property of refractory material measured by plane heat source method with constant heat rate[J]. J. Central South University(Science and Technology),2011,42(5): 467-1472.(in Chinese)
[14] 伍德.光学材料的激光诱导损伤[M].崔旭东,译.成都: 西南交通大学出版社,2011: 59.
WOOD R M. Laser-induced Damage of Optical Materials[M]. CUI X D,Trans. Chengdu: Southwest Jiaotong University Press,2011: 59.
[15] 于长淞.点衍射干涉仪小孔掩模制备与检测技术研究[J].长春理工大学学报(自然科学版),2012,35(4): 24-26.
YU C S. Research of preparation and detection technology of PDI pinhole mask[J]. J. Changchun University of Science and Technology(Natural Science Edition),2012,35(4): 24-26.(in Chinese)
张春雷, 向阳, 于长淞. 高精度干涉仪针孔空间滤波器研制[J]. 中国光学, 2013, 6(6): 952. ZHANG Chun-lei, XIANG Yang, YU Chang-song. Development of pinhole filter in high precision interferometer[J]. Chinese Optics, 2013, 6(6): 952.