基于变压力的CCOS光学研抛技术
叶枫菲, 余德平, 万勇建, 刘海涛, 赵洪深. 基于变压力的CCOS光学研抛技术[J]. 光电工程, 2018, 45(4): 170642.
Ye Fengfei, Yu Deping, Wan Yongjian, Liu Haitao, Zhao Hongshen. Study on the variable pressure CCOS polishing technology[J]. Opto-Electronic Engineering, 2018, 45(4): 170642.
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叶枫菲, 余德平, 万勇建, 刘海涛, 赵洪深. 基于变压力的CCOS光学研抛技术[J]. 光电工程, 2018, 45(4): 170642. Ye Fengfei, Yu Deping, Wan Yongjian, Liu Haitao, Zhao Hongshen. Study on the variable pressure CCOS polishing technology[J]. Opto-Electronic Engineering, 2018, 45(4): 170642.
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