光电工程, 2018, 45 (4): 170642, 网络出版: 2018-05-29
基于变压力的CCOS光学研抛技术
Study on the variable pressure CCOS polishing technology
补充材料
叶枫菲, 余德平, 万勇建, 刘海涛, 赵洪深. 基于变压力的CCOS光学研抛技术[J]. 光电工程, 2018, 45(4): 170642. Ye Fengfei, Yu Deping, Wan Yongjian, Liu Haitao, Zhao Hongshen. Study on the variable pressure CCOS polishing technology[J]. Opto-Electronic Engineering, 2018, 45(4): 170642.