射频磁控反应溅射氮氧化硅薄膜的研究
朱勇, 顾培夫, 沈伟东, 邹桐. 射频磁控反应溅射氮氧化硅薄膜的研究[J]. 光学学报, 2005, 25(4): 567.
朱勇, 顾培夫, 沈伟东, 邹桐. Study of Silicon Oxynitride Film Deposited by RF Magnetron Sputtering[J]. Acta Optica Sinica, 2005, 25(4): 567.
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朱勇, 顾培夫, 沈伟东, 邹桐. 射频磁控反应溅射氮氧化硅薄膜的研究[J]. 光学学报, 2005, 25(4): 567. 朱勇, 顾培夫, 沈伟东, 邹桐. Study of Silicon Oxynitride Film Deposited by RF Magnetron Sputtering[J]. Acta Optica Sinica, 2005, 25(4): 567.